Electron beam recorder for patterned media mastering

Japanese Journal of Applied Physics

Volumn 49, Issue 6 PART 2, 2010, Pages

  Kitahara, Hiroaki ^a   Uno, Yuhei ^a   Suzuki, Hiroaki ^a   Kobayashi, Takashi ^a   Tanaka, Hiroshi ^a   Kojima, Yoshiaki ^a   Kobayashi, Masaki ^a   Katsumura, Masahiro ^a   Wada, Yasumitsu ^a   Iida, Tetsuya ^a  

^a PIONEER CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AREAL DENSITIES; BIT-PATTERNED MEDIUM; DISCRETE TRACK MEDIUM; ELECTRON BEAM MASTERING; ELECTRON BEAM RECORDERS; EXPOSURE-TIME; FORMATTERS; HARD DISK DRIVES; HIGH THROUGHPUT; HIGH-DENSITY RECORDING; HIGH-PRECISION; KEY TECHNOLOGIES; PATTERNED MEDIAS; RECORDING PERFORMANCE; RECORDING STABILITY; SMALL FEATURES; TECHNICAL FEATURES; TIGHT TOLERANCES; TRACK PITCH;

ELECTRON BEAMS; ELECTRON OPTICS; HARD DISK STORAGE; NANOIMPRINT LITHOGRAPHY;

OPTICAL DISK STORAGE;

EID: 77955331769     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.06GE02     Document Type: Article

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