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Volumn 40, Issue 3 B, 2001, Pages 1653-1660
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High-density recording using an electron beam recorder
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Author keywords
Beam blanker; Electron beam; High density recording; Jitter; Mastering; Optical disk
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Indexed keywords
CONTAMINATION;
ELECTRON BEAMS;
JITTER;
LASERS;
OPTICAL DISK STORAGE;
SCANNING ELECTRON MICROSCOPY;
SENSITIVITY ANALYSIS;
ELECTRON BEAM COLUMN;
ELECTRON BEAM RECORDERS;
OPTICAL RECORDING;
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EID: 0035267774
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.40.1653 Document Type: Article |
Times cited : (60)
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References (12)
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