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Volumn 40, Issue 3 B, 2001, Pages 1653-1660

High-density recording using an electron beam recorder

Author keywords

Beam blanker; Electron beam; High density recording; Jitter; Mastering; Optical disk

Indexed keywords

CONTAMINATION; ELECTRON BEAMS; JITTER; LASERS; OPTICAL DISK STORAGE; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS;

EID: 0035267774     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.1653     Document Type: Article
Times cited : (60)

References (12)
  • 11
    • 33646965820 scopus 로고    scopus 로고
    • Data available online from The Swedish Nanometer Laboratory as a part of Radiation Resists-Basic Data.
    • Data available online from The Swedish Nanometer Laboratory as a part of Radiation Resists-Basic Data.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.