Electron beam recording beyond 200 Gbit/in2 density for next generation optical disk mastering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 B, 2005, Pages 3578-3582

  Katsumura, Masahiro ^a   Sato, Megumi ^a   Hashimoto, Kazunobu ^a   Hosoda, Yasuo ^a   Kasono, Osamu ^a   Kitahara, Hiroaki ^a   Kobayashi, Masaki ^a   Iida, Tetsuya ^a   Kuriyama, Kazumi ^a  

^a PIONEER CORPORATION   (Japan)

Author keywords

Electron beam; Jitter; Mastering; Optical disk; Scattering

Indexed keywords

BACKSCATTERING; DENSITY (OPTICAL); ELECTRON BEAMS; ELECTRON IRRADIATION; ELECTRON SCATTERING; JITTER; LENSES; OPTICAL DISK STORAGE; OPTICAL RESOLVING POWER; ROM; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM RECORDING (EBR); HIGH-DENSITY PATTERNING; MASTERING; OPTICAL DISKS;

OPTICAL RECORDING;

EID: 23144447785     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3578     Document Type: Conference Paper

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