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Volumn 87, Issue 9, 2010, Pages 1769-1776

Anti-buckling S-shaped vertical microprobes with branch springs

Author keywords

Anti buckling; Branch spring; Vertical probe

Indexed keywords

BRANCH SPRING; CONTACT FORCES; DESIGN REQUIREMENTS; IC CHIPS; MICRO-PROBES; NI-CO ELECTROPLATING; PROBE CARDS; S-SHAPED; TEST EQUIPMENTS; VERTICAL PROBE; WAFER LEVEL TESTING;

EID: 77955229026     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.10.014     Document Type: Conference Paper
Times cited : (11)

References (12)
  • 4
    • 3042826630 scopus 로고    scopus 로고
    • Multi layer electroplated micro spring array for MEMS probe card
    • K. Kataoka, Multi layer electroplated micro spring array for MEMS probe card, in: MEMS 2004, 17th IEEE Conference, 2004, pp. 733-736.
    • (2004) MEMS 2004, 17th IEEE Conference , pp. 733-736
    • Kataoka, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.