A study on the fatigue behaviour of electro-plated NiCo thin film for probe tip applications

Materialwissenschaft und Werkstofftechnik

Volumn 40, Issue 3, 2009, Pages 187-191

  Park, J H ^a   Chun, Y B ^b   Kim, Y J ^b   Huh, Y H ^c   Lee, H J ^d  

^a Tongmyong University   (South Korea)

^b Korea University   (South Korea)

^c Korea Research Institute of Standards and Science   (South Korea)

^d Korea Institute of Machine and Materials   (South Korea)

Author keywords

High cycle fatigue test; MEMS; NiCo alloy; Probe; Thin film

Indexed keywords

AMBIENT ENVIRONMENT; CLOSED-LOOP FEEDBACK CONTROL; ELECTRIC ACTUATORS; FATIGUE BEHAVIOUR; FATIGUE LIFE PREDICTION; FATIGUE STRENGTH; FATIGUE TESTS; GOODMAN METHOD; HIGH CYCLE FATIGUE TEST; MEAN STRESS; MEMS PROCESS; NICO ALLOY; PLATING PROCESS; PROBE TIPS; SODERBERG; STRESS RATIO; TEST MACHINE; TEST PROCEDURES; VARIABLE LOADINGS;

ALLOYS; FATIGUE OF MATERIALS; FATIGUE TESTING; MEMS; MICROELECTROMECHANICAL DEVICES; PROBES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; THIN FILM DEVICES; THIN FILMS;

TESTING;

EID: 67649194712     PISSN: 09335137     EISSN: 15214052     Source Type: Journal    
DOI: 10.1002/mawe.200900425     Document Type: Conference Paper

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