A wireless embedded resonant pressure sensor fabricated in the standard LTCC technology

IEEE Sensors Journal

Volumn 9, Issue 12, 2009, Pages 1956-1962

  Radosavljević, Goran J ^a   Živanov, Ljiljana D ^a   Smetana, Walter ^b   Marić, Andrea M ^a   Unger, Michael ^b   Nad, Laslo F ^a  

^a UNIVERSITY OF NOVI SAD   (Serbia)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Embedded resonant pressure sensor; Low temperature co fired ceramics (LTCC) technology; Modeling and simulation of LTCC pressure sensor

Indexed keywords

AGGRESSIVE ENVIRONMENT; ANALYTICAL CALCULATION; ANTENNA MODEL; ELECTRICAL CHARACTERISTIC; ELECTRICAL SIMULATION; EXPERIMENTAL SETUP; HIGH TEMPERATURE; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC TECHNOLOGY; MODELING AND SIMULATION OF LTCC PRESSURE SENSOR; PRECISE MEASUREMENTS; PRESSURE VARIATIONS; RESONANT FREQUENCIES; RESONANT PRESSURE SENSORS; SENSOR DESIGNS; SENSOR SENSITIVITY; SIMULATION RESULT; WIRELESS DATA; YOUNG'S MODULUS;

CERAMIC MATERIALS; COMPUTER SIMULATION; NATURAL FREQUENCIES; TECHNOLOGY;

PRESSURE SENSORS;

EID: 77955224868     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2030974     Document Type: Article

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