Capacitive pressure sensor in post-processing on LTCC substrates

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 234-239

  Meijerink, M G H ^a   Nieuwkoop, E ^a   Veninga, E P ^a   Meuwissen, M H H ^a   Tijdink, M W W J ^a  

^a TNO   (Netherlands)

Author keywords

Autonomous sensor; Capacitive; Creep; LTCC; Pressure sensor; Soldering

Indexed keywords

CAPACITANCE; CERAMIC MATERIALS; FABRICATION; LOW TEMPERATURE EFFECTS; PRESSURE EFFECTS; SOLDERING; SUBSTRATES;

CREEP BEHAVIOR; INTERFACE CIRCUITRY; LTCC SUBSTRATE; PRESSURE SENSORS;

SENSORS;

EID: 24944513397     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.04.026     Document Type: Conference Paper

References (7)

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