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Volumn , Issue , 2010, Pages 297-302
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The advanced pattern designs with electrical test methodologies on through silicon via for CMOS image sensor
b
Xintec Inc
(Taiwan)
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Author keywords
CMOS Image Sensor; Electrical Characterization; Through Silicon Via (TSV); Wafer Level Interconnection
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Indexed keywords
3-D INTEGRATION;
CMOS IMAGE SENSOR;
ELECTRICAL CHARACTERIZATION;
ELECTRICAL CONTINUITY;
ELECTRICAL MEASUREMENT;
ELECTRICAL TESTS;
METAL LAYER;
ON-WAFER;
PATTERN DESIGNS;
TEST PATTERN;
THROUGH-SILICON-VIA;
VIA RESISTANCE;
WAFER LEVEL;
CONTACT RESISTANCE;
DESIGN;
DIGITAL CAMERAS;
DIGITAL IMAGE STORAGE;
IMAGE SENSORS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
ELECTRONICS PACKAGING;
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EID: 77955207780
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ECTC.2010.5490958 Document Type: Conference Paper |
Times cited : (13)
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References (8)
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