Realization of Kapton™ based optical interconnect by KMnO4 wet etching

Applied Physics A: Materials Science and Processing

Volumn 99, Issue 4, 2010, Pages 783-789

  Cai, D K ^a   Neyer, A ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BEFORE AND AFTER; LEAD-FREE SOLDERING; OPTICAL INTERCONNECT; TEMPERATURE TREATMENTS; WAVEGUIDE LAYERS;

ELECTRIC POWER SYSTEM INTERCONNECTION; INTEGRATED OPTICS; MECHANICAL PROPERTIES; MECHANICAL STABILITY; MICROCHANNELS; OPTICAL INTERCONNECTS; POLYIMIDES; SILICONES; WET ETCHING;

OPTICAL PROPERTIES;

EID: 77954886535     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-010-5723-z     Document Type: Article

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