Study of low power deposition of ITO for top emission oled with facing target and RF sputtering systems

Journal of Physics: Conference Series

Volumn 100, Issue PART 4, 2008, Pages

  Dangtip, S ^a   Hoshi, Y ^b   Kasahara, Y ^b   Onai, Y ^b   Osotchan, T ^a   Sawada, Y ^b   Uchida, T ^b  

^a Mahidol University   (Thailand)

^b TOKYO POLYTECHNIC UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FACINGS; ITO GLASS; MAGNETRONS; SPUTTERING; SUBSTRATES; NANOSCIENCE; ORGANIC LIGHT EMITTING DIODES (OLED); TRANSPARENT ELECTRODES; VACUUM APPLICATIONS;

DEPOSITION SYSTEMS; FACING TARGET SPUTTERING; GLASS SUBSTRATES; ORGANIC LAYERS; RF SPUTTERING SYSTEM; SPUTTERED PARTICLES; SPUTTERING SYSTEMS; TRANSPARENT ELECTRODE; DIRECT CONTACT;

DEPOSITION; ITO GLASS;

EID: 77954336216     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/4/042011     Document Type: Conference Paper

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