Si moulds for glass and polymer microlenses replication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6992, Issue , 2008, Pages

  Albero, J ^a   Nieradko, L ^a   Gorecki, C ^a   Ottevaere, H ^b   Gomez, V ^b   Pietarinen, J ^c  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^c UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

Glass microlenses; Silicon moulds; Wet etching of silicon

Indexed keywords

CHEMICALS; ETCHING; GLASS; MICROLENSES; MOLDS; NONMETALS; OPTICS; POLYMERS; SILICON; STANDARDS; TECHNOLOGY;

(100) SILICON; ACID SOLUTIONS; ALKALINE SOLUTIONS; CONVENTIONAL PHOTOLITHOGRAPHY; FABRICATION PROCESSES; GLASS MICROLENSES; ISOTROPIC ETCHING; MICRO-OPTICS; POLYMER MICROLENSES;

SILICON WAFERS;

EID: 45149087441     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.783093     Document Type: Conference Paper

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