Highly sensitive hydrogen detection by medium energy Ne+ impact

Surface Science

Volumn 604, Issue 17-18, 2010, Pages

  Mitsuhara, K ^a   Kushida, T ^a   Okumura, H ^a   Matsumoto, H ^a   Visikovskiy, A ^a   Kido, Y ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Hydrogen atoms; Medium energy ion scattering; Silicon; Titanium oxide

Indexed keywords

BRIDGING OXYGEN; ELASTIC RECOIL DETECTION ANALYSIS; HIGHLY SENSITIVE; HYDROGEN ATOMS; HYDROGEN DETECTION; MEDIUM ENERGY; MEDIUM ENERGY ION SCATTERING; ROOM TEMPERATURE; SI (1 1 1); SOLID SURFACE; SURFACE NORMALS; TIME-OF-FLIGHT TECHNIQUES; TIO; TOROIDAL ANALYZER; WATER MOLECULE;

HYDROGEN; IONS; NEON; OXYGEN; PLASMA INTERACTIONS; TITANIUM; TITANIUM OXIDES;

ATOMS;

EID: 77953869304     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2010.05.018     Document Type: Article

References (20)

1. Sumitomo K., Kobayashi T., Shoji F., Oura K., and Katayama I. Phys. Rev. Lett. 66 (1991) 1193
2. Oura K., Lifshits V.G., Saranin A.A., Zotov A.V., and Katayama M. Surf. Sci. Rep. 35 (1999) 1
3. Doyle A.M., Shaikhutdinov Sh.K., and Freund H.-J. J. Catal. 223 (2004) 444
4. Benninghoven A., Müller K.-H., Plog C., Schemmer M., and Steffens P. Surf. Sci. 63 (1977) 403
5. Chabal Y.J., and Raghavachari K. Phys. Rev. Lett. 53 (1984) 282
6. Takahagi T., Nagai I., Ishitani A., and Kuroda H. J. Appl. Phys. 64 (1988) 3516
7. Iwata Y., Fujimoto F., Vilalta E., Ootuka A., Komaki K., Kobayashi K., Yamashita H., and Murata Y. Nucl. Instrum. Meth. B 33 (1988) 574
8. Copel M., and Tromp R.M. Rev. Sci. Instrum. 64 (1993) 3147
9. Shoji F., Yamada A., Shiramizu T., and Oura K. Nucl. Instrum. Meth. B 135 (1998) 366
10. Kimura K., Nakajima K., and Imura H. Nucl. Instrum. Meth. B 140 (1998) 397
11. Dollinger G., Bergmaier A., Goergens L., Neumaier P., Vandervorst W., and Jakschik S. Nucl. Instrum. Meth. B 219-220 (2004) 333
12. Mikami A., Takagawa T., Nishio K., Ogawa H., Okazawa T., and Kido Y. Appl. Surf. Sci. 252 (2006) 5124
13. Ueda K., Kodama S., and Takano A. Surf. Sci. 283 (1993) 195
14. Nishimura T., Ikeda A., Koshikawa T., Yasue T., and Kido Y. Surf. Sci. 409 (1998) 183
15. Ziegler J.F., Biersack J.P., and Littmark W. The Stopping and Range of Ions in Matter (1985), Pergamon, New York
16. Higashi G.S., Becker R.S., Chabal Y.J., and Becker A.J. Appl. Phys. Lett. 58 (1991) 1656
17. Okazawa T., Kohyama M., and Kido Y. Surf. Sci. 600 (2006) 4430
18. Marion J.B., and Young F.C. Nuclear Reaction Analysis - Graphs and Tables (1968), North-Holland, Amsterdam
19. Wendt S., Matthiesen J., Schaub R., Vestergaard E.K., Lægsgaard E., Besenbacher F., and Hammer B. Phys. Rev. Lett. 96 (2006) 066107
20. Allegretti F., O'Brien S., Polcik M., Sayago D.I., and Woodruff D.P. Surf. Sci. 600 (2006) 1487