Direct detection of H(D) on Si(001) and Si(111) surfaces by medium-energy recoil spectroscopy

Surface Science

Volumn 409, Issue 2, 1998, Pages 183-188

  Nishimura, T ^a   Ikeda, A ^a   Koshikawa, T ^b   Yasue, T ^b   Kido, Y ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b OSAKA ELECTRO COMMUNICATION UNIVERSITY   (Japan)

Author keywords

Hydrogen; Medium energy ion scattering (MEIS); Silicon

Indexed keywords

CHEMICAL OPERATIONS; CLEANING; ELECTRODES; HYDROGEN; IONS; SCATTERING; SEMICONDUCTING SILICON;

ELASTIC RECOIL ANALYSIS; ELECTROSTATIC ANALYZER; MEDIUM ENERGY ION SCATTERING;

SURFACE TREATMENT;

EID: 0032115004     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00183-6     Document Type: Article

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