Fabrication and characterization of linear diffusers based on concave micro lens arrays

Optics Express

Volumn 18, Issue 13, 2010, Pages 14251-14261

  Bitterli, Roland ^a   Scharf, Toralf ^a   Herzig, Hans Peter ^a   Noell, Wilfried ^a   De Rooij, Nico ^a   Bich, Andreas ^b   Roth, Sylvain ^b   Weible, Kenneth J ^b   Voelkel, Reinhard ^b   Zimmermann, Maik ^c   Schmidt, Michael ^c  

^a EPFL   (Switzerland)

^b SUSS MICROOPTICS SA   (Switzerland)

^c Bayerische Laserzentrum GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SOURCES; MICROOPTICS;

CONCAVE MICRO-LENSES; DIFFUSE LIGHT; FLAT-TOP; FLY'S EYE CONDENSER; HIGH-POWER; MICRO-LENS ARRAYS; NEW APPROACHES;

MICROLENSES;

SILICON DIOXIDE;

ARTICLE; COMPUTER SIMULATION; DIFFUSION; EQUIPMENT DESIGN; EXCIMER LASER; INSTRUMENTATION; OPTICAL INSTRUMENTATION; OPTICS; SCANNING ELECTRON MICROSCOPY; THEORETICAL MODEL;

COMPUTER SIMULATION; DIFFUSION; EQUIPMENT DESIGN; LASERS, EXCIMER; LENSES; MICROSCOPY, ELECTRON, SCANNING; MODELS, THEORETICAL; OPTICS AND PHOTONICS; SILICON DIOXIDE;

EID: 77953814226     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.014251     Document Type: Article

References (11)

1. M. Miyasaka and J. Stoemenos, "Excimer laser annealing of amorphous and solid-phase-crystallized silicon films," J. Appl. Phys. 86(10), 5556-5565 (1999).
2. G. Schröder, Technische Optik, Grundlagen und Anwendungen, (Vogel Verlag und Druck, 2002).
3. R. Bitterli, M. Kim, T. Scharf, H. P. Herzig, A. Bich, C. Duinouchel, S. Roth, R. Voelkel, and K. J. Weible, "Refractive Statistical concave 1D diffusers for laser beam shaping," Proc. SPIE 7062, 70620P (2008).
4. I. Steingoetter and H. Fouckhardt, "Deep fused silica wet etching using an Au-free and stress-reduced sputterdeposited Cr hard mask," J. Micromech. Microeng. 15(11), 2130-2135 (2005).
5. H. Zhu, M. Holl, T. Ray, S. Bhushan, and D. R. Meldrum, "Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition," J. Micromech. Microeng. 19, 065013 (2009).
6. F. Wippennann, U.-D. Zeitner, P. Dannberg, A. Bräuer, and S. Sinzinger, "Beam homogenizers based on chirped microlens arrays," Opt. Express 15(10), 6218-6231 (2007).
7. T. A. Leskova, A. A. Maradudin, E. R. Méndez, and A. V. Shchegrov, "The design and fabrication of onedimensional random, surfaces with specified scattering properties," Phys. Solid State 41 (5), 835-841 (1999).
8. M. C. King and D. H. Berry, "Small-angle diffusing screens for photolithographic camera illumination systems," Appl. Opt. 11(11), 2460-2462 (1972).
9. E. R. Méndez, E. E. García-Guerrero, H. M. Escamilla, A. A. Maradudin, T. A. Leskova, and A. V. Shchegrov, "Photofabrication of random, achromatic optical diffusers for uniform illumination," Appl. Opt. 40(7), 1098-1108 (2001).
10. N. M. Ganzherli, "Microlens rasters and holographic diffusers based on PFG-01 silver halide photographic material," J. Opt. Technol. 76, 384-387 (2009).
11. J. Albero, L. Nieradko, C. Gorecki, H. Ottevaere, V. Gomez, H. Thienpont, J. Pietarinen, B. Päivänranta, and N. Passilly, "Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques," Opt. Express 17(8), 6283-6292 (2009).