Refractive statistical concave 1D diffusers for laser beam shaping

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7062, Issue , 2008, Pages

  Bitterli, Roland ^a   Kim, M ^a   Scharf, Toralf ^a   Herzigl, Hans Peter ^a   Bich, Andreas ^b   Dumouehel, Christine ^b   Roth, Sylvain ^b   Völkel, Reinhard ^b   Weible, K J ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b SUSS MICROOPTICS SA   (Switzerland)

Author keywords

Beam shaping; Concave micro structure; Fused silica; Isotropic etching; Laser line; Micro lens

Indexed keywords

ETCHING; FABRICATION; HIGH POWER LASERS; LASER APPLICATIONS; LASER BEAMS; LASERS; LIGHT; MICROLENSES; OPTICAL INSTRUMENTS; OPTICAL PROPERTIES; OXIDES; PRINTERS (COMPUTER); SILICA;

BEAM SHAPING; CONCAVE MICRO STRUCTURE; ISOTROPIC ETCHING; LASER LINE; MICRO LENS;

FUSED SILICA;

EID: 57549097283     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.793605     Document Type: Conference Paper

References (6)

1. Miyasaka, M. and Stoemenos, J., "Excimer laser annealing of amorphous and solid-phase-erystallized silicon films," Journal of Applied Physics 86, 5556-5565 (November 1999).
2. Schröder, G., [Technische Optik, Grundlagen und Anwendungen], Vogel Verlag und Druck (2002).
3. Steingoetter, I. and Fouckhardt, H., "Deep fused silica wet etching using an Au-free and stress-reduced sputter-deposited Cr hard mask," Journal of Micro-mechanics and Microengineering 15, 2130-2135 (2005).
4. Williams, K. R. and Muller, R. S., "Etch rates for micromachining processing," JMEMS 5, 256-269 (December 1996).
5. Saleh, B. and Teich, M., [Fundamentals of Photonics], John Wiley & Sons, inc. (1991).
6. Wippermann, F., Zeitner, U.-D., Dannberg, P., Bräuer, A., and Sinzinger, S., "Beam homogenizers based on chirped microlens arrays," Optics Express 15, 6218-6231 (May 2007).