Response of electrostatically actuated flexible MEMS structures to the onset of low-velocity contact

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009

Volumn 4, Issue PART C, 2010, Pages 1777-1786

  Wilcox, Bryan ^a   Dankowicz, Harry ^a   Lacarbonara, Walter ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH FABRICATION; BEAM ELEMENTS; BEAM STRUCTURES; CLAMPED BEAMS; CONTACT REGIONS; ELECTROSTATIC ACTUATION; LOW-VELOCITY; LUMPED-PARAMETER; MASS MODELS; MEMS-STRUCTURE; MICRO-SCALES; MODEL DESCRIPTION; NUMERICAL SIMULATION; PACKAGING SIZE; PHYSICAL CONSTRAINTS; PHYSICAL CONTACTS; RAPID TRANSIENTS; REDUCED ORDER MODELS; RESPONSE AMPLITUDES; SCALING EFFECTS; SILICON-BASED; STEADY STATE SYSTEMS; STEADY-STATE RESPONSE; SUSPENSION STRUCTURE; SYSTEM ENERGY; SYSTEM FREQUENCY; TRANSIENT DYNAMICS; VIBRO-IMPACTING SYSTEMS;

COMPUTER SIMULATION; DAMPING; ELECTROSTATIC ACTUATORS; FLEXIBLE STRUCTURES; MODELS; SENSORS;

STRUCTURAL DESIGN;

EID: 77953750391     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2009-87011     Document Type: Conference Paper

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