The micromechanical resonant switch (“resoswitch”)

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 40-43

  Lin, Yang ^a   Li, Wei Chang ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; MICROSYSTEMS; SWITCHING; TIME SWITCHES;

ACTUATION VOLTAGES; DYNAMICAL PROPERTIES; MECHANICAL STRUCTURES; MICRO-MECHANICAL; MICROMECHANICAL SWITCH; OPERATING FREQUENCY; RESONANCE FREQUENCIES; RESONANT SWITCHES;

SOLID-STATE SENSORS;

EID: 85020558824     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.11     Document Type: Conference Paper

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