-
1
-
-
0027884466
-
-
Murarka, S.; Gutmann, R.; Kaloyeros, A.; Lanford, W. Thin Solid Films 1993, 236, 257-266
-
(1993)
Thin Solid Films
, vol.236
, pp. 257-266
-
-
Murarka, S.1
Gutmann, R.2
Kaloyeros, A.3
Lanford, W.4
-
2
-
-
0039436914
-
-
Green, M.; Gusev, E.; Degraeve, R.; Garfunkel, E. J. Appl. Phys. 2001, 90, 2057-2121
-
(2001)
J. Appl. Phys.
, vol.90
, pp. 2057-2121
-
-
Green, M.1
Gusev, E.2
Degraeve, R.3
Garfunkel, E.4
-
3
-
-
11444268991
-
-
Wahl, G.; Metz, C.; Samoilenkov, S. J. Phys. IV 2001, 11, 835-846
-
(2001)
J. Phys. IV
, vol.11
, pp. 835-846
-
-
Wahl, G.1
Metz, C.2
Samoilenkov, S.3
-
4
-
-
0041699760
-
-
Haynes, J.; Pint, B.; More, K.; Zhang, Y.; Wright, I. Comput. Chem. Eng. 2002, 58, 513-544
-
(2002)
Comput. Chem. Eng.
, vol.58
, pp. 513-544
-
-
Haynes, J.1
Pint, B.2
More, K.3
Zhang, Y.4
Wright, I.5
-
5
-
-
0033719495
-
-
Will, J.; Mitterdorfer, A.; Kleinlogel, C.; Perednis, D.; Gauckler, L. Solid State Ionics 2000, 131, 79-96
-
(2000)
Solid State Ionics
, vol.131
, pp. 79-96
-
-
Will, J.1
Mitterdorfer, A.2
Kleinlogel, C.3
Perednis, D.4
Gauckler, L.5
-
6
-
-
1542349080
-
-
Liu, Y.; Zha, S.; Liu, M. Adv. Mater. 2004, 16, 256-260
-
(2004)
Adv. Mater.
, vol.16
, pp. 256-260
-
-
Liu, Y.1
Zha, S.2
Liu, M.3
-
7
-
-
10144252474
-
-
Meng, G.; Song, H.; Dong, Q.; Peng, D. Solid State Ionics 2004, 175, 29-34
-
(2004)
Solid State Ionics
, vol.175
, pp. 29-34
-
-
Meng, G.1
Song, H.2
Dong, Q.3
Peng, D.4
-
8
-
-
0141855643
-
-
Noyes Publications/William Andrew Pub.: Norwich, NY
-
Seshan, K. Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications; Noyes Publications/William Andrew Pub.: Norwich, NY, 2002; Vol 2.
-
(2002)
Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment and Applications
, vol.2
-
-
Seshan, K.1
-
9
-
-
0034325420
-
-
Edgar, T. F.; Butler, S. W.; Campbell, W. J.; Pfeiffer, C.; Bode, C.; Hwang, S. B.; Balakrishnan, K. S.; Hahn, J. Automatica 2000, 36, 1567-1603
-
(2000)
Automatica
, vol.36
, pp. 1567-1603
-
-
Edgar, T.F.1
Butler, S.W.2
Campbell, W.J.3
Pfeiffer, C.4
Bode, C.5
Hwang, S.B.6
Balakrishnan, K.S.7
Hahn, J.8
-
12
-
-
0006752860
-
-
Liu, D.-J.; Weeks, J. D.; Johnson, M.; Williams, E. D. Phys. Rev. B 1997, 55, 7653-7659
-
(1997)
Phys. Rev. B
, vol.55
, pp. 7653-7659
-
-
Liu, D.-J.1
Weeks, J.D.2
Johnson, M.3
Williams, E.D.4
-
14
-
-
0029272156
-
-
Hukka, T. I.; Pakkanen, T. A.; D'Evelyn, M. P. J. Phys. Chem. 1995, 99, 4710-4719
-
(1995)
J. Phys. Chem.
, vol.99
, pp. 4710-4719
-
-
Hukka, T.I.1
Pakkanen, T.A.2
D'Evelyn, M.P.3
-
15
-
-
0000648128
-
-
Southwell, R.; Mendicino, M.; Seebauer, E. J. Vacuum Sci. Technol. A 1996, 14, 928-934
-
(1996)
J. Vacuum Sci. Technol. A
, vol.14
, pp. 928-934
-
-
Southwell, R.1
Mendicino, M.2
Seebauer, E.3
-
16
-
-
0035648165
-
-
Kennedy, A.; Marc, C.; O'Hagan, A. J. R. Stat. Soc. B 2001, 63, 425-464
-
(2001)
J. R. Stat. Soc. B
, vol.63
, pp. 425-464
-
-
Kennedy, A.1
Marc, C.2
O'Hagan, A.3
-
19
-
-
1942423544
-
-
Topol, A. W.; Dunn, K. A.; Barth, K. W.; Nuesca, G. M.; Taylor, B. K.; Dovidenko, K.; Kaloyeros, A. E.; Tuenge, R. T.; King, C. N. J. Mater. Res. 2004, 19, 697-706
-
(2004)
J. Mater. Res.
, vol.19
, pp. 697-706
-
-
Topol, A.W.1
Dunn, K.A.2
Barth, K.W.3
Nuesca, G.M.4
Taylor, B.K.5
Dovidenko, K.6
Kaloyeros, A.E.7
Tuenge, R.T.8
King, C.N.9
-
20
-
-
9644257257
-
-
Robbins, J. J.; Harvey, J.; Leaf, J.; Fry, C.; Wolden, C. A. Thin Solid Films 2005, 473, 35-40
-
(2005)
Thin Solid Films
, vol.473
, pp. 35-40
-
-
Robbins, J.J.1
Harvey, J.2
Leaf, J.3
Fry, C.4
Wolden, C.A.5
-
21
-
-
21244500093
-
-
Bao, T.; Morrison, P. W.; Woyczynski, W. A. Thin Solid Films 2005, 485, 27-41
-
(2005)
Thin Solid Films
, vol.485
, pp. 27-41
-
-
Bao, T.1
Morrison, P.W.2
Woyczynski, W.A.3
-
22
-
-
13844280408
-
-
Li, J. F.; Liao, H. L.; Ding, C.; Coddet, C. J. Mater. Proc. Technol. 2005, 160, 34-42
-
(2005)
J. Mater. Proc. Technol.
, vol.160
, pp. 34-42
-
-
Li, J.F.1
Liao, H.L.2
Ding, C.3
Coddet, C.4
-
25
-
-
77953339080
-
-
Nourbakhsh, A.; Ganjipour, B.; Zahedifar, M.; Arzi, E. Nanotechnology 2007, 18, 1-7
-
(2007)
Nanotechnology
, vol.18
, pp. 1-7
-
-
Nourbakhsh, A.1
Ganjipour, B.2
Zahedifar, M.3
Arzi, E.4
-
30
-
-
0038271644
-
-
Frey, D. D.; Engelhardt, F.; Greitzer, E. M. Res. Eng. Des. 2003, 14, 65-74
-
(2003)
Res. Eng. Des.
, vol.14
, pp. 65-74
-
-
Frey, D.D.1
Engelhardt, F.2
Greitzer, E.M.3
-
31
-
-
0000561424
-
-
Jones, D. R.; Schonlau, M.; Welch, W. J. J. Global Optimization 1998, 13, 455-492
-
(1998)
J. Global Optimization
, vol.13
, pp. 455-492
-
-
Jones, D.R.1
Schonlau, M.2
Welch, W.J.3
-
32
-
-
23744461815
-
-
Henkenjohann, N.; Gobel, R.; Kleiner, M.; Kunert, J. Qual. Reliability Eng. Int. 2004, 21, 439-455
-
(2004)
Qual. Reliability Eng. Int.
, vol.21
, pp. 439-455
-
-
Henkenjohann, N.1
Gobel, R.2
Kleiner, M.3
Kunert, J.4
-
34
-
-
0034092122
-
-
Pulver, M.; Nemetz, W.; Wahl, G. Surf. Coat. Technol. 2000, 125, 400-406
-
(2000)
Surf. Coat. Technol.
, vol.125
, pp. 400-406
-
-
Pulver, M.1
Nemetz, W.2
Wahl, G.3
-
35
-
-
77953331817
-
-
Thesis, Georgia Institute of Technology, Atlanta, Georgia
-
Wissmann, P. J. Simultaneous Model Building and Process Design using Experimental Design: Application to Chemical Vapor Deposition, Thesis, Georgia Institute of Technology, Atlanta, Georgia, 2008.
-
(2008)
Simultaneous Model Building and Process Design Using Experimental Design: Application to Chemical Vapor Deposition
-
-
Wissmann, P.J.1
-
36
-
-
15544382871
-
-
Pomfret, M. B.; Stoltz, C.; Varughese, B.; Walker, R. A. Anal. Chem. 2005, 77, 1791-1795
-
(2005)
Anal. Chem.
, vol.77
, pp. 1791-1795
-
-
Pomfret, M.B.1
Stoltz, C.2
Varughese, B.3
Walker, R.A.4
-
37
-
-
17044395557
-
-
Pasko, S.; Hubert-Pfalzgraf, L. G.; Abrutis, A. Mater. Lett. 2005, 59, 1836-1840
-
(2005)
Mater. Lett.
, vol.59
, pp. 1836-1840
-
-
Pasko, S.1
Hubert-Pfalzgraf, L.G.2
Abrutis, A.3
-
42
-
-
33748049129
-
-
Evans, J.; Pa, T.; Bartelt, M. Surf. Sci. Rep. 2006, 61, 1-128
-
(2006)
Surf. Sci. Rep.
, vol.61
, pp. 1-128
-
-
Evans, J.1
Pa, T.2
Bartelt, M.3
-
43
-
-
35949035159
-
-
Aspnes, D.; Theeten, J.; Hottier, F. Phys. Rev. B 1979, 20, 3292-3302
-
(1979)
Phys. Rev. B
, vol.20
, pp. 3292-3302
-
-
Aspnes, D.1
Theeten, J.2
Hottier, F.3
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