Superhard C1-x-yNxZry composite films prepared by pulsed bias arc ion plating

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 25, Issue 5, 2010, Pages 517-521

  Li, Hong Kai ^a   Lin, Guo Qiang ^a   Dong, Chuang ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Arc ion plating; DLC film; Pulsed bias; Superhard composite film

Indexed keywords

ARC CURRENT; ARC ION PLATING; CEMENTED CARBIDE SUBSTRATES; CRYSTALLINE PHASE; DEPOSITED FILMS; DIAMOND-LIKE CARBON; DLC FILM; GRAPHITE TARGET; N CONTENT; NITROGEN FLOW RATES; PULSED BIAS; PULSED BIAS ARC ION PLATINGS; RAMAN SPECTRA; SUPERHARD; SUPERHARD COMPOSITES; XRD;

CARBIDES; CARBON FILMS; DIAMOND LIKE CARBON FILMS; ION IMPLANTATION; PLATING; RAMAN SPECTROSCOPY; TARGETS; ZIRCONIUM;

COMPOSITE FILMS;

EID: 77953272027     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: 10.3724/SP.J.1077.2010.00517     Document Type: Article

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