A new cluster-ion-beam source for secondary ion mass spectrometry (SIMS) using the electrospray of a pure ionic liquid under high vacuum

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 11-12, 2010, Pages 1938-1941

  Fujiwara, Yukio ^a   Saito, Naoaki ^a   Nonaka, Hidehiko ^a   Nakanaga, Taisuke ^a   Ichimura, Shingo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Charged droplet; Cluster ion; Electrospray; Ion beam; Ionic liquid; SIMS

Indexed keywords

BIS(TRIFLUOROMETHANE SULFONYL)IMIDE; CHARGED DROPLET; CLUSTER BEAM SOURCES; CLUSTER ION; CLUSTER IONS; CONSTANT FLOW RATES; ELECTROSPRAY; ELECTROSPRAYS; GAS COMPONENT; GAS PRESSURES; HIGH CONDUCTIVITY; HIGH VACUUM; ION-BEAM SOURCES; POSITIVE MODE; RESIDUAL GAS ANALYSIS; ROOM-TEMPERATURE MOLTEN SALTS;

AMMONIUM COMPOUNDS; ATMOSPHERIC PRESSURE; DROP FORMATION; FUSED SALTS; ION BEAMS; IONIZATION OF LIQUIDS; IONS; SECONDARY ION MASS SPECTROMETRY; STAINLESS STEEL; VACUUM;

IONIC LIQUIDS;

EID: 77953140338     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.02.097     Document Type: Article

References (34)

1. Benninghoven A. Surf. Sci. 299/300 (1994) 246
2. Castner D.G. Nature 422 (2003) 129
3. Wittmaack K. Surf. Interface Anal. 21 (1994) 323
4. Vandervorst W. Appl. Surf. Sci. 255 (2008) 805
5. Winograd N. Anal. Chem. A-Pages 77 (2005) 142A
6. Weibel D., Wong S., Lockyer N., Blenkinsopp P., Hill R., and Vickerman J.C. Anal. Chem. 75 (2003) 1754
7. Iltgen K., Bendel C., Benninghoven A., and Niehuis E. J. Vac. Sci. Technol. A 15 (1997) 460
8. Gillen G., King L., and Chmara F. J. Vac. Sci. Technol. A 17 (1999) 845
9. Davies N., Weibel D.E., Blenkinsopp P., Lockyer N., Hill R., and Vickerman J.C. Appl. Surf. Sci. 203/204 (2003) 223
10. Sanada N., Yamamoto A., Oiwa R., and Ohashi N. Surf. Interface Anal. 36 (2004) 280
11. Kollmer F. Appl. Surf. Sci. 231/232 (2004) 153
12. Tomita M., Kinno T., Koike M., Tanaka H., Takeno S., Fujiwara Y., Kondou K., Teranishi Y., Nonaka H., Fujimoto T., Kurokawa A., and Ichimura S. Appl. Phys. Lett. 89 (2006) 053123
13. Fujiwara Y., Kondou K., Teranishi Y., Nonaka H., Fujimoto T., Kurokawa A., and Ichimura S. Jpn. J. Appl. Phys. 45 (2006) L987
14. Ninomiya S., Nakata Y., Ichiki K., Seki T., Aoki T., and Matsuo J. Nucl. Instrum. Methods B 256 (2007) 493
15. Matsuo J., Ninomiya S., Nakata Y., Honda Y., Ichiki K., Seki T., and Aoki T. Appl. Surf. Sci. 22 (2008) 1235
16. Moritani K., Mukai G., Hashinokuchi M., and Mochiji K. Appl. Phys. Express 2 (2009) 046001
17. Hiraoka K., Asakawa D., Fujimaki S., Takamizawa A., and Mori K. Eur. Phys. J.D. 38 (2006) 225
18. Hiraoka K., Mori K., and Asakawa D. J. Mass Spectrom. 41 (2006) 894
19. Asakawa D., Mori K., and Hiraoka K. Appl. Surf. Sci. 255 (2008) 1217
20. Wasserscheid P., and Keim W. Angew. Chem. Int. Ed. 39 (2000) 3722
21. Enderes F., and Zein El Abedin S. Phys. Chem. Chem. Phys. 8 (2006) 2101
22. Lozano P., and Martínez-Sánchez M. J. Colloid Interface Sci. 280 (2004) 149
23. Lozano P., and Martínez-Sánchez M. J. Colloid Interface Sci. 282 (2005) 415
24. Chiu Y.H., Gaeta G., Levandier D.J., Dressler R.A., and Boatz J.A. Int. J. Mass Spectrom. 265 (2007) 146
25. Larriba C., Castro S., Fernández de la Mora J., and Lozano P. J. Appl. Phys. 101 (2007) 084303
26. Romero-Sanz I., Bocanegra R., Fernández de la Mora J., and Gamero-Castaño M. J. Appl. Phys. 94 3599 (2003)
27. Garoz D., Bueno C., Larriba C., Castro S., Romero-Sanz I., Fernández de la Mora J., Yoshida Y., and Saito G. J. Appl. Phys. 102 (2007) 064913
28. Taylor G.I. Proc. Roy. Soc. A 280 (1964) 383
29. Kebarle P. J. Mass Spectrom. 35 (2000) 804
30. Blades A.T., Ikonomou M.G., and Kebarle P. Anal. Chem. 63 (1991) 2109
31. Fernández de la Mora J., Van Berkel G.J., Enke C.G., Cole R.B., Gamero-Castaño M., and Fenn J.B. J. Mass Spectrom. 35 (2000) 939
32. .
33. Kudo M., Kato N., and Aoyagi S. J. Fac. Sci. Tech. Seikei Univ. 43 (2006) 35
34. Cloupeau M., and Prunet-Foch B. J. Aerosol Sci. 25 (1994) 1021