Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

Applied Physics Letters

Volumn 89, Issue 5, 2006, Pages

  Tomita, M ^a   Kinno, T ^a   Koike, M ^a   Tanaka, H ^a   Takeno, S ^a   Fujiwara, Y ^b   Kondou, K ^b   Teranishi, Y ^b   Nonaka, H ^b   Fujimoto, T ^b   Kurokawa, A ^b   Ichimura, S ^b  

^a TOSHIBA CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; ION BOMBARDMENT; OPTICAL RESOLVING POWER; SECONDARY ION MASS SPECTROMETRY; SURFACE ROUGHNESS;

ATOMIC MIXING; DEPTH RESOLUTION; INCIDENT ANGLES; METAL CLUSTER COMPLEX IONS;

IMAGE ANALYSIS;

EID: 33748457953     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2266995     Document Type: Article

References (11)

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