A pre-sample charge measurement system for quantitative NMP-analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 11-12, 2010, Pages 1727-1730

  Kristiansson, P ^a   Borysiuk, M ^a   Arteaga Marrero, N ^a   Elfman, M ^a   Nilsson, E J C ^a   Nilsson, C ^a   Pallon, J ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

Beam blanker; Charge measurement; Faraday cup; Nuclear microprobe; Quantitative analysis

Indexed keywords

BEAM CURRENTS; BEAM DEFLECTION; BEAM SCANNING SYSTEMS; CHARGE MEASUREMENTS; DATA COLLECTION; DIFFERENT MODES; FARADAY CUPS; MATRIX COMPOSITION; NORMAL OPERATIONS; NUCLEAR MICROPROBES; QUANTITATIVE ANALYSIS; QUANTITATIVE MEASUREMENT; TEST RESULTS;

CHEMICAL ANALYSIS; MEASUREMENTS;

PIXELS;

EID: 77953137444     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.02.119     Document Type: Article

References (17)

1. Grime G.W. The "Q factor" method: quantitative microPIXE analysis using RBS normalisation. Nucl. Instrum. Methods B 109/110 (1996) 170-174
2. El Bouanani M., Pelicon P., Razpet A., Cadez I., Budnar M., Simcic J., and Markelj S. Simple and accurate spectra normalization in ion beam analysis using a transmission mesh-based charge integration. Nucl. Instrum. Methods B 243 (2006) 392-396
3. Johansson S.A.E., and Campbell J.L. PIXE: A Novel Technique for Elemental Analysis (1989), Wiley, UK
4. Fisher B.E., Heiß M., and Cholewa M. Preparatory experiments for a single ion hit facility at GSI. Nucl. Instrum. Methods B 210 (2003) 296
5. Matsukawa T., Fukai T., Suzuki S., Hara K., Koh M., and Ohdomari I. Development of single ion implantation - controllability of implanted ion number. Appl. Surf. Sci. 117-118 (1997) 677-683
6. Auzelyte V., Elfman M., Kristiansson P., Malmqvist K., Wallman L., Nilsson C., Pallon J., Shariff A., and Wegdén M. The beam blanking system for microlithography at Lund nuclear microprobe. Nucl. Instrum. Methods B 219-220 (2004) 485
7. Auzelyte V., Andersson F., Elfman M., Kristiansson P., Pallon J., Wegdén M., Nilsson C., and Arteaga N. On-line measurement of proton beam current in pA range. Nucl. Instrum. Methods B 249 (2006) 760
8. Malmqvist K.G., Hyltén G., Hult M., Håkansson K., Knox J.M., Larsson N.P.-O., Nilsson C., Pallon J., Schofield R., Swietlicki E., Tapper U.A.S., and Changyi Y. Dedicated accelerator and microprobe line. Nucl. Instrum. Methods B 77 (1993) 3-7
9. Shariff A., Nilsson C., Auzelyte V., Elfman M., Kristiansson P., Malmqvist K., Pallon J., and Wegdén M. The Lund nuclear microprobe sub-micron set-up. Part II: beam line, focusing system and scanning. Nucl. Instrum. Methods B 231 (2005) 7-13
10. Elfman M., Pallon J., Auzelyte V., Kristiansson P., Malmqvist K., Nilsson C., Shariff A., and Wegdén M. The Lund nuclear microprobe sub-micron set-up. Part III: sample stage, optical imaging and detector configuration in the experimental chamber. Nucl. Instrum. Methods B 231 (2005) 14-20
11. Elfman M., Kristiansson P., Malmqvist K., and Pallon J. The layout and performance of the LUND nuclear microprobe trigger and data acquisition system. Nucl. Instrum. Methods B 158 (1999)
12. Available from: .
13. Available from: .
14. Shariff A., Kristiansson P., Auzelyte V., Elfman M., Malmqvist K., Nilsson C., Pallon J., and Wegdén M. Characterization of a new large area HPGe X-ray detector for low beam current application. Nucl. Instrum. Methods B 219-220 (2004) 494-498
15. Kristiansson P., Hålenius U., Skogby H., Elfman M., Malmqvist K., and Pallon J. Boron distributions in single crystals investigated with nuclear reaction micro analysis. Nucl. Instrum. Methods B 158 (1999) 62
16. Skogby H., Kristiansson P., and Hålenius U. An assessment of nuclear microprobe analyses of boron in silicate minerals. Am. Mineral. 88 (2003) 1601-1604
17. Wegdén M., Kristiansson P., Pastuovic Z., Skogby H., Auzelyte V., Elfman M., Malmqvist K., Nilsson C., Pallon J., and Shariff A. Hydrogen analysis by p-p scattering in geological material. Nucl. Instrum. Methods B 219-220 (2004) 550-554