Simple and accurate spectra normalization in ion beam analysis using a transmission mesh-based charge integration

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 243, Issue 2, 2006, Pages 392-396

  El Bouanani, M ^a   Pelicon, P ^b   Razpet, A ^b   Cadez I ^b   Budnar, M ^b   Simcic J ^b   Markelj, S ^b  

^a UNIVERSITY OF NORTH TEXAS   (United States)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Beam charge normalization; Elastic recoil detection analysis (ERDA); Ion implantation; Rutherford backscattering spectroscopy (RBS)

Indexed keywords

CHARGE CARRIERS; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

BEAM CHARGE RENORMALIZATION; ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

ION BEAMS;

EID: 30844464826     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.09.002     Document Type: Article

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