The Lund Nuclear Microprobe sub-micron set-up. Part III: Sample stage, optical imaging and detector configuration in the experimental chamber

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 14-20

  Elfman, M ^a   Pallon, J ^a   Auzelyte, V ^a   Kristiansson, P ^a   Malmqvist, K ^a   Nilsson, C ^a   Shariff, A ^a   Wegden M ^a  

^a LUND INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Experimental chamber; Nuclear microprobe; Sub micron setup

Indexed keywords

COMPUTER CONTROL; DETECTORS; OPTICAL RESOLVING POWER;

EXPERIMENTAL CHAMBER; NUCLEAR MICROPROBE; SUB MICRON SETUP;

IMAGING TECHNIQUES;

EID: 33644503566     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.028     Document Type: Conference Paper

References (8)

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8. Physik Instrumente (PI) GmbH, Auf der Roemerstrasse 1, D-76228 Karlsruhe, (http://www.pi.ws )