CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 5, 2007, Pages 1423-1428

  Barillaro, G ^a   Bruschi, P ^a   Pieri, F ^a   Strambini, L M ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC INTERFACE; MAXIMUM COMPATIBILITY; MICROELECTRONIC PROCESS;

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; ELECTRONIC EQUIPMENT; ENERGY GAP; INTEGRATED CIRCUITS; MICROELECTRONICS;

POROUS SILICON;

EID: 34547210834     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200674370     Document Type: Article

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