A high-flow Knudsen pump using a polymer membrane: Performance at and below atmospheric pressures

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 1095-1098

  Gupta, Naveen Kumar ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Gas flow; Knudsen pump; Liquid flow; Nanoporous polymer; Thermal transpiration

Indexed keywords

GAS FLOWS; KNUDSEN PUMP; LIQUID FLOW; NANOPOROUS POLYMERS; THERMAL TRANSPIRATION;

AERODYNAMICS; ATMOSPHERIC PRESSURE; FLOW OF GASES; FUNCTIONAL POLYMERS; GASES; LIQUIDS; MECHANICAL ENGINEERING; MECHANICS; MEMBRANES; POLYMERS; REACTIVE ION ETCHING; TRANSPIRATION; VACUUM PUMPS;

ATMOSPHERIC MOVEMENTS;

EID: 77952786695     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442401     Document Type: Conference Paper

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