Soft-X-ray-charged vertical electrets and its application to electrostatic transducers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 635-638

  Honzumi, Makoto ^a   Ueno, Ai ^a   Hagiwara, Kei ^b   Suzuki, Yuji ^a   Tajima, Toshifumi ^b   Kasagi, Nobuhide ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NHK SCIENCE AND TECHNICAL RESEARCH LABORATORIES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLING PROCESS; ELECTROSTATIC TRANSDUCERS; GAP OPENING; IN-PLANE ACCELEROMETER; NARROW GAP; SINGLE WAFER; SOFT X-RAY;

MECHANICAL ENGINEERING; MECHANICS; POLYETHERIMIDES; REACTIVE ION ETCHING; TRANSDUCERS;

ELECTRETS;

EID: 77952770581     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442328     Document Type: Conference Paper

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