Electrostatic droplet manipulation using electret as a voltage source

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 591-594

  Wu, Tianzhun ^a   Suzuki, Yuji ^a   Kasagi, Nobuhide ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; COMPOSITE MICROMECHANICS; DIELECTRIC DEVICES; DIELECTRIC MATERIALS; DROP FORMATION; ELECTRETS; ELECTRIC CURRENTS; ELECTRIC EQUIPMENT; ELECTRODES; ELECTROPHORESIS; ELECTROSTATICS; ENERGY STORAGE; FLUID MECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALLIZING; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; REACTIVE ION ETCHING; SILICONES;

CHARGE DECAY; CIRCUIT MODELING; DIELECTRIC DROPLET; DIELECTROPHORESIS; DROPLET MANIPULATION; DROPLET MOTION; ELECTRO-WETTING; EXTERNAL-; GLASS SUBSTRATES; INTERNATIONAL CONFERENCES; ITO ELECTRODES; LOW VOLTAGES; MICRO-ELECTRO MECHANICAL SYSTEMS; PARYLENE; PROTOTYPE DEVICES; SILICONE OILS; VOLTAGE SOURCES;

DROPS;

EID: 50149116581     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443725     Document Type: Conference Paper

References (10)

1. S. Cho, H. Moon, and C. Kim, "Creating, Transporting, Cutting, and Merging Liquid Droplets by Electrowetting-Based Actuation for Digital Microfluidic Circuits", J. Microelectromech. Syst., vol. 12, pp. 70-80, 2003.
2. F. Krogmann, W. Monch, and H. Zappe, "A MEMS-based Variable Micro-lens System", J. Opt. A, vol. 8, pp. S330-336, 2006.
3. H. Moon and S. Cho, "Low voltage electrowetting-on-dielectric", J. Appl. Phys., vol. 92, pp. 4080-4087, 2002.
4. B. Shapiro, H. Moon, R. Garrell, and C. Kim, "Equilibrium Behavior of Sessile Drops under Surface Tension Applied External Fields, and Material Variations", J. Appl. Phys., vol. 93, pp. 5794-5811, 2003.
5. T. Jones, "Liquid Dielectrophoresis on the Microscale", J. Electrost., vol. 51-52, pp. 290-299, 2001.
6. T. Jones, "On the Relationship of Dielectrophoresis and Electrowetting", Langmuir, vol. 18, pp. 4437-4443, 2002.
7. W. Hsieh, T. Yao, and Y. Tai, "A High Performance MEMS Thin-film Teflon Electret Microphone", Transducers '99, Sendai, pp. 1064-1067, 1999.
8. J. Boland, C. Chao, Y. Suzuki, and Y. Tai, "Micro Electret Power Generator", IEEE Int. Conf. MEMS'03, Kyoto, pp. 538-541, 2003.
9. J. Boland, J. Messenger, H. Lo, and Y. Tai, "Arrayed Liquid Rotor Electret Power Generator Systems", IEEE Int. Conf. MEMS'05, Miami, pp. 618-621, 2005.
10. T. Tsutsumino, Y. Suzuki, N. Kasagi, and Y. Sakane, "Seismic Power Generator Using High-performance Polymer Electret", IEEE Int. Conf. MEMS'06, Istanbul, pp. 98-101, 2006.