Non-contact electrostatic micro-bearing using polymer electret

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 511-514

  Tsurumi, Yukinori ^a   Suzuki, Yuji ^a   Kasagi, Nobuhide ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRETS; ELECTROSTATICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING;

APPLICATIONS.; CONTROL METHODS; IN-PLANE; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NON-CONTACT; OUT-OF PLANE; POLYMER MATERIALS; REPULSIVE ELECTROSTATIC FORCE; REPULSIVE FORCES;

POLYMERS;

EID: 50149113930     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443705     Document Type: Conference Paper

References (8)

1. N. Ramakrishnan et al., "Sliding Contact Micro-Bearing for Nano-precision Sensing and Positioning", Proc. Transducers & Eurosensors '07, Lyon, pp. 1689-1692, 2007.
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3. A. Modafe, N. Ghlichechian, A. Frey, J. H. Lang, and R. Ghodssi, "Microball-Bearing-Supported Electrostatic Micromachines with Polymer Dielectric Films for Electromechanical Power Conversion", J. Micromech. Microeng., vol. 16, pp. S182-S190, 2006.
4. G. M. Sessler, Electrets, 3rd edition, Laplacian Press, California, 1998.
5. W. Hsieh, T. Yao, and Y-C. Tai, "A High Performance MEMS Thin-film Teflon Electret Microphone", Transducers '99, Sendai, pp. 1064- 1067, 1999.
6. J. Boland, C. Chao, Y. Suzuki, and Y. Tai, "Micro Electret Power Generator", IEEE Int. Conf. MEMS'03, Kyoto, pp. 538-541, 2003.
7. T. Tsutsumino, Y. Suzuki, N. Kasagi, and Y. Sakane, "Seismic Power Generator Using High-Performance Polymer Electret", Proc. 19th IEEE Int. Conf. MEMS'06, Istanbul, pp. 98-101, 2006.
8. L. Chang, J. B. Luo, and W. Zhang, "Mechanical Characteristics of SiO2 Electrets", Science in China, Ser. E, vol. 45, pp. 444-448, 2002.