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Volumn 31, Issue 2, 2010, Pages 239-242

Influence of oxygen flow rate on the morphology and the optical properties of thin ZnO films grown by pulsed laser deposition

Author keywords

O2 flow rate; Pulsed laser deposition; ZnO thin films

Indexed keywords

DEEP-LEVEL DEFECTS; DIRECT BAND GAP; EMISSION BANDS; HIGH QUALITY; INFLUENCE OF OXYGEN; NEAR BAND EDGE EMISSIONS; O2 FLOW RATE; OPTICAL TRANSMITTANCE; OXYGEN FLOW RATES; PREFERRED ORIENTATIONS; ROOM TEMPERATURE; SINGLE CRYSTAL SILICON; THIN FILM QUALITY; ULTRAVIOLET OPTOELECTRONIC DEVICES; UV LASERS; VACUUM CHAMBERS; WIDE-BAND-GAP SEMICONDUCTOR; ZNO; ZNO FILMS; ZNO THIN FILM; ZNO THIN FILMS;

EID: 77952618974     PISSN: 10007032     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (6)

References (13)
  • 1
    • 15844381938 scopus 로고    scopus 로고
    • Transparent conductive ZnO thin films on glass substrates deposited by pulsed laser deposition
    • Shan F K, Liu G X, Lee W J, et al. Transparent conductive ZnO thin films on glass substrates deposited by pulsed laser deposition [J]. J. Crys. Grow., 2005, 277(1-4): 284-292.
    • (2005) J. Crys. Grow , vol.277 , Issue.1-4 , pp. 284-292
    • Shan, F.K.1    Liu, G.X.2    Lee, W.J.3
  • 2
    • 14644391565 scopus 로고    scopus 로고
    • Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si(111) substrates using PLD
    • Wang Z Y, Hu L Z, Zhao J, et al. Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si(111) substrates using PLD [J]. Vacuum, 2005, 78(1): 53-57.
    • (2005) Vacuum , vol.78 , Issue.1 , pp. 53-57
    • Wang, Z.Y.1    Hu, L.Z.2    Zhao, J.3
  • 3
    • 27844546755 scopus 로고    scopus 로고
    • Preparation of intrinsic and n-doped p-type ZnO thin films by metalorganie vapor phase epitaxy
    • Du G T, Ma Y, Zhang Y T, et al. Preparation of intrinsic and n-doped p-type ZnO thin films by metalorganie vapor phase epitaxy [J]. Appl. Phys. Lett., 2005, 87(21): 213103-1-3.
    • (2005) Appl. Phys. Lett. , vol.87 , Issue.21
    • Du, G.T.1    Ma, Y.2    Zhang, Y.T.3
  • 4
    • 40749136661 scopus 로고    scopus 로고
    • Study on the properties of ZnO films prepared by photo-asscsted MOCVD
    • in Chinese
    • Li Xiangping, Zhang Baolin, Dong Xin, et al. Study on the properties of ZnO films prepared by photo-asscsted MOCVD [J]. Chin. J. Lumin. , 2008, 29(1): 2524-2526 (in Chinese).
    • (2008) Chin. J. Lumin. , vol.29 , Issue.1 , pp. 2524-2526
    • Li, X.1    Zhang, B.2    Dong, X.3
  • 6
    • 55649083551 scopus 로고    scopus 로고
    • Structural and photoluminescence properties of Nd-doped ZnO thin films grown by RF magnetron sputtering
    • in Chinese
    • Wen Jun, Chen Changle. Structural and photoluminescence properties of Nd-doped ZnO thin films grown by RF magnetron sputtering [J]. Chin. J. Lumin. , 2008, 29(5): 856-860 (in Chinese).
    • (2008) Chin. J. Lumin. , vol.29 , Issue.5 , pp. 856-860
    • Wen, J.1    Chen, C.2
  • 7
    • 0037185154 scopus 로고    scopus 로고
    • Effect of the variation of film thickness on the structural and optical properties of ZnO thin films deposited on sapphire substrate using PLD
    • Shim E S, Kang H S, Kang J S, et al. Effect of the variation of film thickness on the structural and optical properties of ZnO thin films deposited on sapphire substrate using PLD [J]. Appl. Surf. Sci., 2002, 186(1-4): 474-476.
    • (2002) Appl. Surf. Sci , vol.186 , Issue.1-4 , pp. 474-476
    • Shim, E.S.1    Kang, H.S.2    Kang, J.S.3
  • 8
    • 0033895982 scopus 로고    scopus 로고
    • Effects of native defects on optical and electrical properties of ZnO prepared by pulsed laser deposition
    • Jin B J, Bae S H, Lee S Y, et al. Effects of native defects on optical and electrical properties of ZnO prepared by pulsed laser deposition [J]. Mater. Sci. Eng. B, 2000, 71(1-3): 301-305.
    • (2000) Mater. Sci. Eng. B , vol.71 , Issue.1-3 , pp. 301-305
    • Jin, B.J.1    Bae, S.H.2    Lee, S.Y.3
  • 9
    • 48949116540 scopus 로고    scopus 로고
    • Fabrication and magnetic properties of Co-doped ZnO thin films by pulsed laser deposition
    • in Chinese
    • Ye Zhigao, Zhu Liping, Peng Yingzi, et al. Fabrication and magnetic properties of Co-doped ZnO thin films by pulsed laser deposition [J]. Chin. J. Lumin. , 2008, 29(3): 486-490 (in Chinese).
    • (2008) Chin. J. Lumin , vol.29 , Issue.3 , pp. 486-490
    • Ye, Z.1    Zhu, L.2    Peng, Y.3
  • 10
    • 0005762811 scopus 로고    scopus 로고
    • Highly oriented ZnO thin films deposited on Ru/Si substrates
    • Lim W T, Lee C H. Highly oriented ZnO thin films deposited on Ru/Si substrates [J]. Thin Solid Films, 1999, 353(1-2): 12-15.
    • (1999) Thin Solid Films , vol.353 , Issue.1-2 , pp. 12-15
    • Lim, W.T.1    Lee, C.H.2
  • 11
    • 77952620624 scopus 로고    scopus 로고
    • Influence of oxygen pressure on the morphology and optical properties of ZnO thin films grown by PLD
    • in Chinese
    • Cao Peijiang, Zeng Yuxiang, Jia Fang, et al. Influence of oxygen pressure on the morphology and optical properties of ZnO thin films grown by PLD [J]. Semiconductor Technology, 2007, 33: 311-314 (in Chinese).
    • (2007) Semiconductor Technology , vol.33 , pp. 311-314
    • Cao, P.1    Zeng, Y.2    Jia, F.3
  • 12
    • 0000288835 scopus 로고    scopus 로고
    • Plasma assisted molecular beam epitaxy of ZnO on c-plane sapphire: Growth and characterization
    • Chen Y F, Bagnall D M, Koh H J, et al. Plasma assisted molecular beam epitaxy of ZnO on c-plane sapphire: Growth and characterization [J]. J. Appl. Phys., 1998, 84(7): 3912-3918.
    • (1998) J. Appl. Phys , vol.84 , Issue.7 , pp. 3912-3918
    • Chen, Y.F.1    Bagnall, D.M.2    Koh, H.J.3
  • 13
    • 0038653186 scopus 로고    scopus 로고
    • Highly monodisperse polymer capped ZnO nanoparticles: preparation and optical properties
    • Lin G, Yang S H, Yang C L, et al. Highly monodisperse polymer capped ZnO nanoparticles: preparation and optical properties [J]. Appl. Phys. Lett., 2000, 76(20): 2901-2903.
    • (2000) Appl. Phys. Lett , vol.76 , Issue.20 , pp. 2901-2903
    • Lin, G.1    Yang, S.H.2    Yang, C.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.