Structure design and fabrication of a novel dual-mass resonant output micromechanical gyroscope

Microsystem Technologies

Volumn 16, Issue 4, 2010, Pages 543-552

  Li, Jianli ^a   Fang, Jiancheng ^a   Dong, Haifeng ^a   Tao, Ye ^a  

^a BEIHANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL ALGORITHMS; ANALYTICAL RESULTS; COMMON MODE; DISPLACEMENT SENSING; DOUBLE-ENDED TUNING FORKS; EXPERIMENTAL METHODS; FINITE ELEMENT SIMULATIONS; FREQUENCY SENSITIVITY; MECHANICAL NOISE; MICRO-FABRICATION TECHNOLOGY; MICRO-MECHANICAL; OPERATING PRINCIPLES; RESONANT FREQUENCIES; RESONANT SENSING; ROTATION RATE; SIGNAL PROCESSING ELECTRONICS; SILICON ON GLASS; STRUCTURE DESIGN; TOPOLOGY STRUCTURE;

FABRICATION; NATURAL FREQUENCIES; SIGNAL PROCESSING;

GYROSCOPES;

EID: 77952554443     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0998-8     Document Type: Article

References (21)

1. Ajit S, Mohammad FZ, et al (2008) A 0.1°/h bias drift electronically matched tuning fork microgyroscope. In: Abstracts of MEMS 2008, Tucson, AZ, USA
2. Bao MH (2000) Micro mechanical transducers: pressure sensors, accelerometers and gyroscope. Elsevier, Amsterdam
3. Brown D, Hicks J (2005) KUTESat-2, a student nanosatellite mission for testing rapid-response small satellite technologies in low earth orbit. In: 3th Annual Responsive Space Conference, Los Angeles, USA
4. Degani OB, Seter DJ, Socher E, Nemirovsky Y (2000) A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation. J Sens Actuators A 83:54-60
5. Djuric Z (2000) Noise sources in microelectromechanical systems. In: IEEE 22th international conference on microelectronics. Serbia May 2000
6. Fang JC, Li JL (2009) Integrated model and compensation of thermal errors of silicon micro electromechanical gyroscope. J IEEE Trans Instrum Meas 58:2923-2930
7. Kubena RL, Kirby DJV, Joyce RJ et al (2000) A new tunneling-based sensor for inertial rotation rate measurements. J Sensors Actuat A 83:109-117
8. Kudo S, Sugawara S, Wakatuki N (1996) Improvement of transitional response characteristics of a piezoelectric vibratory gyroscope. Jpn J Appl Phys 35:3055-3058
9. Lan JH, Nahavandi S et al (2007) Development of low cost motionsensing system. J Meas 40:415-421
10. Li JL, Fang JC, Yu WB (2005) Silicon micromechanical tuning output gyroscope applied at navigation of micro unmanned aerial vehicle. In: AIAA Guidance Navigation and Control Conference and Exhibit. AIAA, San Francisco, USA
11. Maenaka K, Fujita T, Konishi Y, Maeda M (1996) Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass. J Sensors Actuat A 54:568-573
12. Nguyen CT-C, Howe RT (1999) An integrated CMOS micronmechanical resonator high-Q oscillato. IEEE J Solid-State Circuit 34:40-55
13. Paoletti F, Gretillat MA, Rooji NF (1996) A silicon micro-machined vibrating rate gyroscope with piezoresistive detection and electro-magnetic excitation. In: Proceedings of IEEE Microelectromechanical System Workshop, Switzerland
14. Pottenger MD (2001) Design of Micromechanical inertial sensors. Dissertation, University of California
15. Rajendran S, Liewa KM (2004) Design and simulation of an angularrate vibrating microgyroscope. J Sens Actuators A 116:241-256
16. Seshia AA (2002) Integrated micromechanical resonant for inertial measurement systems. Dissertation, University of California, Berkeley
17. Seshia AA, Howe RT, Montague S (2002) An integrated microelectromechanical resonant output gyroscope. In: 15th IEEE Micro Electromechanical Systems Conference. Las Vegas, USA, 2002
18. Wang SR (2000) Silicon micro inertia device theory and application. Southeast University of China, Nan Jing, China
19. Wang YY, Fan SC, et al (2006) A silicon microelectromechanical resonant gyroscope. In: Proceedings of 6th International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation. SPIE, Beijing, People's Republic of China 2006
20. Weng JH, Chieng WH, Lai JM (2005) Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration. J Sens Actuators A 117:230-240
21. Wong CH, Tan MJK, Liew M (2003) Electrical characterisation of RF capacitive microswitch. J Sens Actuators A 102:296-310