A fiber-optic pressure microsensor for biomedical applications

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 150-154

  Tohyama, Osamu ^a   Kohashi, Miki ^a   Sugihara, Masahisa ^a   Itoh, Hirotaka ^a  

^a Mitsubishi Cable Industries Ltd   (Japan)

Author keywords

Balloon catheters; Fiber optic sensors; Pressure measurement; Silicon micromachining

Indexed keywords

CATHETER TIP SENSORS; FIBER OPTIC SENSORS; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE MEASUREMENT; SILICON WAFERS;

FIBER OPTIC PRESSURE MICROSENSORS; SILICON MICROMACHINING;

PRESSURE TRANSDUCERS;

EID: 0032050499     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01764-0     Document Type: Article

References (8)

1. L. Tenerz, B. Hök, T. Engström, 0.5 mm diameter pressure sensor for biomedical applications, Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan, 7-10 June, 1987, pp. 312-315.
2. M.A. Chan, S.D. Collins, R.L. Smith, A micromachined pressure sensor with fiber-optic interferometric readout, Sensors and Actuators A 43 (1994) 196-201.
3. Y. Haga, K. Minami, S. Shoji, S. Nitta, M. Tanaka, M. Esashi, A fiber-optic ultra miniature pressure sensor, Tech. Digest, 12th Sensor Symp., Osaka, Japan, 2-3 June, 1994, pp. 135-138.
4. K. Iwamoto, I. Kamata, Pressure sensor using optical fibers, Appl. Optics 29 (1990) 375-378.
5. A. Wang, M.S. Miller, A.J. Plante, M.F. Gunther, K.A. Murphy, R.O. Clgolds, Split-spectrum intensity-based optical fiber sensors for measurement of microdisplacement, strain, and pressure, Appl. Optics 35 (1996) 2595-2601.
6. O. Tohyama, M. Kohashi, K. Yamamoto, H. Itoh, A fiber-optic silicon pressure sensor for ultra-thin catheters, Sensors and Actuators A 54 (1996) 622-625.
7. O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, S. Sugiyama, Anisotropic etching of silicon in TMAH solution, Sensors and Actuators A 34 (1992) 51-57.
8. W.J. Bock, J. Chrostowski, High-pressure fiber-optic leadthrough system, J. Phys. E: Sci. Instrum. 21 (1988) 839-841.