TCO Thin films with permittivity control

Materials Research Society Symposium Proceedings

Volumn 1165, Issue , 2010, Pages 247-252

  Gessert, T A ^a   Yoshida, Y ^a   Fesenmaier, C C ^a   Duenow, J N ^a   Coutts, T J ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PERMITTIVITIES; LOW MOBILITY; OPTICAL ANALYSIS; PLASMA WAVELENGTH; REAL PART; SPUTTERING TARGET; TRANSPARENT CONDUCTING OXIDE FILMS;

CARRIER CONCENTRATION; CARRIER MOBILITY; CONDUCTIVE FILMS; ITO GLASS; OPTICAL PROPERTIES; OXIDE FILMS; PERMITTIVITY; ZIRCONIUM;

OPTICAL FILMS;

EID: 77952015672     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. T. Coutts, D.L. Young, and X. Li, MRS Bull. 25 (8) 58, (2000).
2. T.J. Coutts, D.L. Young, and T.A. Gessert, "Modeling, Characterization and Properties of Transparent Conducting Oxides," Chapter 3 - Transparent Conducting Oxides, Springer, Expected Pub. Date 2009.
3. T.A. Gessert, Y. Yoshida, C.C. Fesenmaier, and T.J. Coutts, J. Appl. Phys. 105, (2009) (in press).
4. G.D. Wilk, R.M. Wallace, and J.M. Anthony, J. App. Phys. 89 (10), 5243 (2001).
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8. T.A. Gessert, Y. Yoshida, and T.J. Coutts, U.S. Patent Application No. 11/718,628, May 4, 2007.
9. U.S. Patent Application PCT 07-42, T.A. Gessert, J. Duenow, T. Barnes, T.J. Coutts, September 2007.