Sputtered In2 O3 and ITO thin films containing zirconium

Journal of Applied Physics

Volumn 105, Issue 8, 2009, Pages

  Gessert, T A ^a   Yoshida, Y ^a   Fesenmaier, C C ^a   Coutts, T J ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PERMITTIVITIES; DRUDE THEORIES; FILM PROPERTIES; ITO THIN FILMS; LARGE-AREA DEPOSITIONS; NEAR-INFRARED SPECTRAL REGIONS; OPTICAL TRANSPARENCIES; OXYGEN PARTIAL PRESSURES; SPUTTERED THIN FILMS; TRANSPARENT CONDUCTING OXIDES; ZR ADDITIONS;

CARRIER CONCENTRATION; OXYGEN; PARTIAL PRESSURE; PERMITTIVITY; POSITIVE IONS; THIN FILMS; TRANSPARENCY; ZIRCONIUM;

OPTICAL FILMS;

EID: 65449181533     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3116542     Document Type: Article

References (10)

1. R. Groth, Phys. Status Solidi 0031-8957 10.1002/pssb.19660140104 14, 69 (1966).
2. K. L. Chopra, S. Major, and D. K. Pandya, Thin Solid Films 0040-6090 10.1016/0040-6090(83)90256-0 102, 1 (1983).
3. Y. Qu, T. A. Gessert, T. J. Coutts, and R. Noufi, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.579346 12, 1507 (1994).
4. A. L. Leenheer, J. D. Perkins, M. van Hest, J. J. Berry, R. P. O'Hayre, and D. S. Ginley, Phys. Rev. B 0163-1829 10.1103/PhysRevB.77.115215 77, 115215 (2008).
5. Y. Yoshida, D. M. Woods, T. A. Gessert, and T. J. Coutts, Appl. Phys. Lett. 0003-6951 10.1063/1.1687984 84, 2097 (2004).
6. T. Coutts, D. L. Young, and X. Li, MRS Bull. 0883-7694 25, 58 (2000).
7. J. N. Duenow, T. A. Gessert, D. M. Wood, T. M. Barnes, B. To, and T. J. Coutts, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.2735951 25, 955 (2007).
8. T. A. Gessert, Y. Yoshida, and T. J. Coutts, U.S. Patent Application No. 11/718,628 (4 May 2007).
9. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 0021-8979 10.1063/1.1361065 89, 5243 (2001).
10. G. Lucovsky and G. B. Rayner, Jr., Appl. Phys. Lett. 0003-6951 77, 2912 (2000). 10.1063/1.1320860