Wrinkle-based measurement of elastic modulus of nano-scale thin pt film deposited on polymeric substrate: Verification and uncertainty analysis

Experimental Mechanics

Volumn 50, Issue 5, 2010, Pages 635-641

  Choi, H J ^a   Kim, J H ^a   Lee, H J ^a,a   Song, S A ^a   Han, J H ^b   Moon, M W ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Elastic modulus; Nano scale thin film; Pt; Tensile test; Wrinkle

Indexed keywords

COMPRESSIVE LOADING; ELASTIC MODULUS MEASUREMENTS; MICRO TENSILE TESTS; NANO SCALE; NANO-SCALE THIN FILM; POLYDIMETHYLSILOXANE PDMS; POLYMERIC SUBSTRATE; PT FILMS; TENSILE TEST; TENSILE TESTS;

ELASTIC MODULI; NANOSTRUCTURED MATERIALS; PLATINUM; POLYMERIC FILMS; SILICONES; SUBSTRATES; TENSILE TESTING; THIN FILMS;

UNCERTAINTY ANALYSIS;

EID: 77951977557     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-009-9243-8     Document Type: Article

References (23)

1. Kobayashi T, Ichiki M, Noguchi T, Maeda R (2008) Deflection of wafers and cantilevers with Pt/LNO/PZT/LN O/Pt/Ti/SiO2 multilayered structure. Thin Solid Films 516: 5272-5276. doi:10.1016/j.tsf.2007.07.067.
2. Xia Y, Whitesides GM (1998) Soft lithography. Annual Review of Materials Science 28: 153-184. doi:10.1146/annurev.matsci.28.1.153.
3. Abril O, Gundel A, Maroun F, Allongue P, Schuster R (2008) Single-step electrochemical nanolithography of metal thin films by localized etching with an AFM tip. Nanotechnology 19: 325301. doi:10.1088/0957-4484/19/32/325301.
4. Nix WD (1989) Mechanical properties of thin films. Metall Trans A 20: 2217-2245. doi:10.1007/BF02666659.
5. Xiang Y, Xi C, Vlassak JJ (2002) The mechanical properties of electroplated Cu thin film measured by means of bulge test technique. Materials Science and Engineering A 359: 44-51.
6. Oliver WC, Pharr GM (1992) An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. Journal of Materials Research 7: 1564-1580. doi:10.1557/JMR.1992.1564.
7. Espinosa HD, Prorok BC, Fischer M (2003) A methodology for determining mechanical properties of freestanding thin films and MEMS materials. Journal of the Mechanics and Physics of Solids 51: 47-67. doi:10.1016/S0022-5096(02) 00062-5.
8. Sharpe WN Jr, Yuan B, Edwards RL (1997) A new technique for measuring the mechanical properties of thin films. Journal of Microelectromechanical Systems 6: 193-199. doi:10.1109/84.623107.
9. Wilder EA, Guo S, Sheng LG, Fasolka MJ, Stafford CM (2006) Measuring the modulus of soft polymer networks via a buckling-based metrology. Macromol 39: 4138-4143. doi:10.1021/ma060266b.
10. Mei H, Huang R, Chung JY, Stafford CM (2007) Buckling modes of elastic thin films on elastic substrates. Appl Phys Lett 90(151092): 1-3.
11. Huang J, Juszkiewicz M, Jeu WHD, Cerda E, Emrick T, Menon N, Russell TP (2007) Capillary wrinkling of floating thin polymer films. Science 317: 650-653. doi:10.1126/science.1144616.
12. Khang DY, Xiao J, Kocabas C, MacLaren S, Banks T, Jiang H, Huang YY, Rogers JA (2008) Molecular scale buckling mechanics in individual aligned single-wall carbon nanotubes on elastomeric substrates. Nano Letters 8: 124-130. doi:10.1021/nl072203s.
13. Wu H, Odom TW, Chiu DT, Whitesides GM (2003) Fabrication of complex three-dimensional microchannel systems in PDMS. Journal of the American Chemical Society 125: 554-559. doi:10.1021/ja021045y.
14. Moon MW, Lee SH, Sun JY, Oh KH, Vaziri A, Hutchinson JW (2007) Wrinkled hard skins on polymers created by focused ion beam. Proceedings of the National Academy of Sciences of the United States of America 104: 1130-1133. doi:10.1073/pnas.0610654104.
15. Volynskiial AL, Bazhenov S, Lebedeva VN, Bakeev F (2000) Mechanical buckling instability of thin coatings deposited on soft polymer substrates. Journal of Materials Science 35: 547-554. doi:10.1023/A:1004707906821.
16. Chen X, Hutchinson JW (2004) Herringbone buckling patterns of compressed thin films on compliant substrates. Journal of Applied Mechanics 71: 597-603. doi:10.1115/1.1756141.
17. Huang R (2005) Kinetic wrinkling of an elastic film on a viscoelastic substrate. Journal of the Mechanics and Physics of Solids 53: 63-89. doi:10.1016/j.jmps.2004.06.007.
18. Huang ZY, Hong W, Suo Z (2005) Nonlinear analyses of wrinkles in a film bonded to a compliant substrate. Journal of the Mechanics and Physics of Solids 53: 2101-2118. doi:10.1016/j.jmps.2005.03.007.
19. www.webelements.com.
20. Macionczyk F, Bruckner W, Pitschke W, Reiss G (1998) Young's modulus and tensile strength of CuNi(Mn) thin films on polyimide foils. Journal of Materials Research 13(10): 2852-2858. doi:10.1557/JMR.1998.0390.
21. Doebelin EO (1990) Measurement systems. McGraw-Hill, Singapore.
22. Stafford CM, Vogt BD, Harrison C, Julthongpiput D, Huang R (2006) Elastic moduli of ultrathin amorphous polymer films. Macromol 39(19): 5095-5099. doi:10.1021/ma060790i.
23. Mathur A, Erlebacher J (2007) Size dependence of effective Young's modulus of nanoporous gold. Applied Physics Letters 90: 061910. doi:10.1063/1.2436718.