Synthesis of well-defined photoresist materials by SET-LRP

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 48, Issue 10, 2010, Pages 2251-2255

  Fleischmann, Sven ^a   Percec, Virgil ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Living polymerization; Methacrylate monomer; Photoresist; Radical polymerization; Single electron transfer living radical polymerization (SET LRP)

Indexed keywords

LIVING RADICAL POLYMERIZATION; METHACRYLATE MONOMER; METHACRYLATE MONOMERS; RADICAL POLYMERIZATION; SET-LRP; SINGLE ELECTRON TRANSFER;

ATOM TRANSFER RADICAL POLYMERIZATION; ELECTRON TRANSITIONS; FREE RADICAL REACTIONS; MOLECULAR WEIGHT; MONOMERS; ORGANIC SOLVENTS; PHOTORESISTS; POLYMERIZATION; SINGLE ELECTRON TRANSISTORS; SYNTHESIS (CHEMICAL); TRANSIENTS;

POLYMERS;

EID: 77951968119     PISSN: 0887624X     EISSN: 10990518     Source Type: Journal    
DOI: 10.1002/pola.24007     Document Type: Article

References (43)

1. Rosen, B. M.; Percec, V. Chem Rev 2009, 109, 5069-5119.
2. Percec, V.; Guliashvili, T.; Ladislaw, J. S.; Wistrand, A.; Stjerndahl, A.; Sienkowska, M. J.; Monteiro, M. J.; Sahoo, S. J Am Chem Soc 2006, 128, 14156-14165.
3. Percec, V.; Popov, A. V.; Ramierez-Castillo, E.; Monteiro, M.; Barboiu, B.; Weichold, O.; Asandei, A. D.; Mitchell, C. M. J Am Chem Soc 2002, 124, 4940-4941.
4. Percec, V.; Popov, A. V.; Ramirez-Castillo, E.; Weichold, O. J Polym Sci Part A: Polym Chem 2003, 41, 3283-3299.
5. Lligadas, G.; Rosen, B. M.; Bell, C. A.; Monteiro, J. M.; Percec, V. Macromolecules 2008, 41, 8365-8371.
6. Nguyen, N.; Rosen, B. M.; Lligadas, G.; Percec, V. Macromolecules 2009, 42, 2379-2386.
7. Nguyen, N.; Rosen, B. M.; Jiang, X.; Fleischmann, S.; Percec, V. J Polym Sci Part A: Polym Chem 2009, 47, 5577-5590.
8. Lligadas, G.; Percec, V. J Polym Sci Part A: Polym Chem 2007, 45, 4684-4695.
9. Lligadas, G.; Ladislaw, J. S.; Guliashvili, T.; Percec, V. J Polym Sci Part A: Polym Chem 2008, 46, 278-288.
10. Lligadas, G.; Percec, V. J Polym Sci Part A: Polym Chem 2008, 46, 4917-4926.
11. Sienkowska, M. J.; Rosen, B. M.; Percec, V. J Polym Sci Part A: Polym Chem 2009, 47, 4130-4140.
12. Nguyen, N. H.; Rosen, B. M.; Percec, V. J Polym Sci Part A: Polym Chem 2010, 48, 1752-1763.
13. Rosen, B. M.; Lligadas, G.; Hahn, C.; Percec, V. J Polym Sci Part A: Polym Chem 2009, 47, 3940-3948.
14. Hickenboth, C. R.; Moore, J. S.; White, S. R.; Sottos, N. R.; Baudry, J.; Wilson, S. R. Nature 2007, 446, 423-427.
15. Rosen, B. M.; Percec, V. Nature 2007, 446, 381-382.
16. Potisek, S. L.; Davis, D. A.; Sottos, N. R.; White, S. R.; Moore, J. S. J Am Chem Soc 2007, 129, 13808-13809.
17. Davis, D. A.; Hamilton, A.; Yang, J.; Cremar, J. D.; Van Gough, D.; Potisek, S. L.; Ong, M.; Braun, P. V.; Martinez, T. J.; White, S. R.; Moore, J. S.; Sottos, N. Nature 2009, 459, 68-72.
18. Whittaker, M. R.; Urbani, C. N.; Monteiro, M. J. J Polym Sci Part A: Polym Chem 2008, 46, 6346-6357.
19. Tang, X.; Liang, X.; Yang, Q.; Fan, X.; Shen, Z.; Zhou, Q. J Polym Sci Part A: Polym Chem 2009, 47, 4420-4427.
20. Feng, C.; Shen, Z.; Li, Y.; Gu, L.; Zhang, Y.; Lu, G.; Huang, X. J Polym Sci Part A: Polym Chem 2009, 47, 1811-1824.
21. Feng, C.; Shen, X.; Dong, Y.; Li, Y.; Hu, J.; Lu, G.; Huang, X. J Polym Sci Part A: Polym Chem 2009, 47, 4346-4357.
22. Lligadas, G.; Percec, V. J Polym Sci Part A: Polym Chem 2008, 46, 2745-2754.
23. Jiang, X.; Fleischmann, S.; Nguyen, N.; Rosen, B. M.; Percec, V. J Polym Sci Part A: Polym Chem 2009, 47, 5591-5605.
24. Fleischmann, S.; Rosen, B. M.; Percec, V. J Polym Sci Part A: Polym Chem 2010, 48, 1190-1196.
25. Fleischmann, S.; Percec, V. J Polym Sci Part A: Polym Chem 2010, 48, 2236-2242.
26. Hamley, I. W. Angew Chem Int Ed 2003, 42, 1692-1712.
27. Tsarevsky, N. V.; Matyjaszewski, K. Chem Rev 2007, 107, 2270-2299.
28. Moad, G.; Rizzardo, E.; Tang, S. H. Polymer 2008, 49, 1079-1131.
29. Hawker, C. J.; Bosman, A. W.; Harth, E. Chem Rev 2001, 101, 3661-3688.
30. Nguyen, N.; Jiang, X.; Fleischmann, S.; Rosen, B. M.; Percec, V. J Polym Sci Part A: Polym Chem 2009, 47, 5629-5638.
31. Kamon, Y.; Momose, H.; Kuwano, H.; Fujiwara, T.; Fujimoto, M. J Photopolym Sci Technol B 2002, 15, 535-540.
32. Kang, S.; Vogt, B. D.; Wu, W.; Prabhu, V. M.; Vanderhart, D. L.; Turnquest, K. Macromolecules 2007, 40, 1497-1503.
33. Ogata, T.; Furuya, S.; Matsumaru, S.; Hada, H.; Shirai, M. J Photopolym Sci Technol B 2006, 19, 657-662.
34. Engelmann, S.; Bruce, R. S.; Kwon, T.; Phaneuf, R.; Oehrlein, G. S. J Vac Sci Technol B 2007, 25, 1353-1364.
35. Ridaoui, H.; Dirani, A.; Soppera, O.; Ismailova, E.; Brochon, C.; Schlatter, G.; Hadziioannou, G.; Tiron, R.; Bandelier, P.; Sourd, C. J Polym Sci Part A: Polym Chem 2010, 48, 2171-11277
36. Chochos, C. L.; Ismailova, E.; Brochon, C.; Leclerc, N.; Tiron, R.; Sourd, C.; Bandelier, P.; Foucher, J.; Ridaoui, H.; Dirani, A.; Soppera, O.; Perret, D.; Brault, C.; Serra, C. A.; Hadziioannou, G. Adv Mater 2009, 21, 1121-1125.
37. Shirai, M.; Manabe, M.; Tsuji, S.; Itani, T. J Vac Sci Technol B 2006, 25, 3021-3024.
38. Lou, Q.; Kishpaugh, M. A.; Shipp, D. A. J Polym Sci Part A: Polym Chem 2009, 48, 943-950.
39. Ismailova, E.; Tiron, R.; Chochos, C. L.; Brochon, C.; Bandalier, P.; Perret, D.; Sourd, C.; Brault, C.; Serra, C. A.; Schlatter, G.; Hadziioannou, G. Microelectron Eng 2009, 86, 796-799.
40. Yamaguchi, M.; Hirota, Y.; Yamamoto, H. Tokuyama Co.. WO 2,002,010,112, February 01, 2002.
41. Takahashi, H.; Kusaka, H.; Ohgomori, Y. Mitsubishi Chemical Co. WO 2,007,122,691, November 01, 2007.
42. Ciampolini, M.; Nardi, N. Inorg Chem 1966, 5, 41-44.
43. Monteiro, M. J.; Guliashvili, T.; Percec., V. J Polym Sci Part A: Polym Chem 2007, 45, 1835-1847.