Fabrication of plastic microlens arrays for array microscopy by diamond milling techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7590, Issue , 2010, Pages

  McCall, Brian ^a   Birch, Gabriel ^b   Descour, Michael ^b   Tkaczyk, Tomasz ^a  

^a Rice University   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

Array microscope; Diamond milling; Diamond turning; Fabrication; Freeform; Lens array; Micro milling; Microlens

Indexed keywords

DIAMOND MILLING; DIAMOND TURNING; FREEFORM LENS; MICRO MILLING; MICRO-LENS;

COMPOSITE MICROMECHANICS; DIAMONDS; ESTERS; INJECTION MOLDING; MICROANALYSIS; MICROFABRICATION; MICROLENSES; MICROMACHINING; MICROOPTICS; MILLING MACHINES; OPTICAL INSTRUMENT LENSES; PLASTIC LENSES; POLYSTYRENES; TURNING;

MILLING (MACHINING);

EID: 77951634288     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.840794     Document Type: Conference Paper

References (18)

1. Chen, Y., Yi, A.Y., Yao, D., Klocke, F., and Pongs, G., "A reflow process for glass microlens array fabrication by use of precision compression molding," J. Micromech. Microeng. 18(5), 55022 (2008). (Pubitemid 351591379)
2. Moon, S., Lee, N., and Kang, S., "Fabrication of a microlens array using micro-compression molding with an electroformed mold insert," J. Micromech. Microeng. 13, 98-103 (2003).
3. Pan, C., and Su, C., "Fabrication of gapless triangular micro-lens array," Sens. Actuators, A 134(2), 631-640 (2007). (Pubitemid 46349564)
4. Chen, Y., Li, L., and Yi, A.Y., "Fabrication of precision 3D microstructures by use of a combination of ultraprecision diamond turning and reactive ion etching process," J. Micromech. Microeng. 17(5), 883-890 (2007). (Pubitemid 46656139)
5. Yu, W., and Yuan, X., "Fabrication of refractive microlens in hybrid SiO2/TiO2 sol-gel glass by electron beam lithography," Opt. Express 11(8), 899-903 (2003).
6. Albero, J., Nieradko, L., Gorecki, C., Ottevaere, H., Gomez, V., Thienpont, H., Pietarinen, J., Päivänranta, B., and Passilly, N., "Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques," Opt. Express 17(8), 6283-6292 (2009).
7. Wang, M.R., and Su, H., "Laser Direct-Write Gray-Level Mask and One-Step Etching for Diffractive Microlens Fabrication," Appl. Opt. 37(32), 7568-7576 (1998).
8. Fritze, M., Stern, M.B., and Wyatt, P.W., "Laser-fabricated glass microlens arrays," Opt. Lett. 23(2), 141-143 (1998).
9. Forest, C.R., Saez, M.A., and Hunter, I.W., "Microforging technique for rapid, low-cost fabrication of lens array molds," Appl. Opt. 46(36), 8668-8673 (2007).
10. Keyworth, B.P., Corazza, D.J., McMullin, J.N., and Mabbott, L., "Single-step fabrication of refractive microlens arrays," Appl. Opt. 36(10), 2198-2202 (1997).
11. Weinstein, R.S., Descour, M.R., Liang, C., Barker, G., Scott, K.M., Richter, L., Krupinski, E.A., Bhattacharyya, A.K., Davis, J.R., Graham, A.R., Rennels, M., Russum, W.C., Goodall, J.F., Zhou, P., Olszak, A.G., Williams, B.H., Wyant, J.C., and Bartels, P.H., "An array microscope for ultrarapid virtual slide processing and telepathology. Design, fabrication, and validation study," Hum. Pathol. 35(11), 1303-1314 (2004). (Pubitemid 39601569)
12. Sweatt, W., Gill, D., Adams, D., Vasile, M., and Claudet, A., "Diamond milling of micro-optics," IEEE Trans. Aerosp. Electron. Syst. 23(1), 13-17 (2008).
13. Holme, N.C.R., Berg, T.W., and Dinesen, P.G., "Diamond micro-milling for array mastering," Proc. SPIE 7062, 70620J-70620J-8 (2008).
14. Davis, G.E., Roblee, J.W., and Hedges, A.R., "Comparison of freeform manufacturing techniques in the production of monolithic lens arrays," Proc. SPIE 7426, 742605-742605-742608 (2009).
15. Kasarova, S.N., Sultanova, N.G., Ivanov, C.D., and Nikolov, I.D., "Analysis of the dispersion of optical plastic materials," Opt. Mater. 29(11), 1481-1490 (2007).
16. Kester, R.T., Tkaczyk, T.S., Descour, M.R., Christenson, T., and Richards-Kortum, R., "High numerical aperture microendoscope objective for a fiber confocal reflectance microscope," Opt. Express 15(5), 2409-2420 (2007).
17. "Nanotech 250UPL Ultra Precision Lathe | Moore Nanotechnology Systems," http://www.nanotechsys.com/machines/nanotech-250upl-ultra- precision-lathe/, (2010).
18. Pfeffer, M., [Handbook of Plastic Optics], ch. Optomechanics of Plastic Optical Components, S. Bäumer, ed., 7-33, Wiley-VCH, Weinheim (2005).