Diamond micro-milling for array mastering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7062, Issue , 2008, Pages

  Holme, N C R ^a   Berg, T W ^a   Dinesen, P G ^a  

^a Kaleido Technology Aps   (Denmark)

Author keywords

Diamond machining; Micro milling; Optics tooling

Indexed keywords

DIAMONDS; LASER BEAMS; LENSES; MILLING MACHINES; OPTICAL INSTRUMENTS;

ASPHERICAL; ETCHING METHODS; FORM ACCURACIES; MICRO-MILLING; MILLING PROCESS; ON WAFERS; POSITION ACCURACIES; RADII OF CURVATURES; REPLICATION TECHNOLOGIES; ULTRA PRECISION; VERSATILE TOOLS;

MILLING (MACHINING);

EID: 57549102104     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.796480     Document Type: Conference Paper

References (1)

1. Moore Nanotechnology Systems, http://www.nanotechsys.com