MEMS deformable mirrors for focus control in vital microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7594, Issue , 2010, Pages

  Lutzenburger, B Jeffrey ^b   Moghimi, Mohammad J ^a   Lukes, Sarah J ^a   Kaylor, Brant ^b   Dickensheets, David L ^a  

^a Idaho National Laboratory   (United States)

^b Bridger Photonics Inc   (United States)

Author keywords

Membrane mirror; MEMS; Spherical aberration; SU 8; Variable focus

Indexed keywords

ABERRATION COMPENSATION; BONDING PROCESS; CURED EPOXY; DEFORMABLE MEMBRANE MIRRORS; FOCUS CONTROL; LARGE DISPLACEMENTS; MEMBRANE MIRROR; MEMS DEFORMABLE MIRROR; MICROSCOPE IMAGES; POLYMER MEMBRANE; SPHERICAL ABERRATIONS; VARIABLE FOCUS;

ABERRATIONS; DEFORMATION; ELECTROSTATIC ACTUATORS; FUNCTIONAL POLYMERS; MOEMS; SPHERES;

MIRRORS;

EID: 77951566189     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.843874     Document Type: Conference Paper

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