SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 632-635

Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography

(6) Chen, Jing a,b Shi, Jian a Decanini, Dominique a Cambril, Edmond a Chen, Yong c Haghiri Gosnet, Anne Marie a

a CNRS (France)

b NORTHWESTERN POLYTECHNICAL UNIVERSITY (China)

c ECOLE NORMALE SUPÉRIEURE (France)

Author keywords

Nanohole array; Sensor; Soft UV nanoimprint lithography; Surface plasmon resonance

Indexed keywords

BIOCHEMICAL SENSING; CHEMICAL SENSING; DIELECTRIC INDICES; HOLE ARRAYS; HOLE DIAMETERS; LIFT-OFF PROCESS; METALLIC ARRAYS; NANO HOLES; NANOHOLE ARRAY; OPTICAL CHARACTERISATION; REACTIVE-ION ETCHINGS; RED SHIFTS; SOFT UV NANOIMPRINT LITHOGRAPHY; SURFACE MODIFICATIONS; SURROUNDING ENVIRONMENTS; THEORETICAL PREDICTIONS; TRANSMISSION PEAKS; TRANSMISSION SPECTRUMS;

CHEMICAL MODIFICATION; FABRICATION; GOLD; PLASMONS; REACTIVE ION ETCHING; SENSORS; SURFACE PLASMON RESONANCE;

NANOIMPRINT LITHOGRAPHY;

EID: 67349174814 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2008.12.093 Document Type: Article

Times cited : (65)

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