Fabrication and application of a microfluidic-embedded silicon nanowire biosensor chip

Physica Status Solidi (A) Applications and Materials Science

Volumn 207, Issue 4, 2010, Pages 850-857

  Vu, Xuan Thang ^a,b   Stockmann, Regina ^a,b   Wolfrum, Bernhard ^a,b   Offenhäuser, Andreas ^a,b   Ingebrandt, Sven ^a,b,c  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Institute of Bio and Nanosystems   (Germany)

^c UNIVERSITY OF APPLIED SCIENCES KAISERSLAUTERN   (Germany)

Author keywords

Biosensors; Field effect device; Nanoelectronic devices; Polyelectrolytes

Indexed keywords

ANALYTES; CHARACTERIZATION MEASUREMENT; CHARGED POLYELECTROLYTES; CONTACT LINES; ETCHING STEP; FIELD-EFFECT DEVICES; MOLECULAR DETECTION; NANOELECTRONIC DEVICES; ONE CHIP; SERIES RESISTANCES; SILICON LAYER; SILICON NANOWIRES; SILICON ON INSULATOR WAFERS; SOURCE AND DRAINS; THERMAL NANOIMPRINT LITHOGRAPHY; TIME-DEPENDENT; TOP-DOWN PROCESS; TRANSISTOR ARRAYS; TWO-LINE; WET-CHEMICAL ETCHING;

AMINO ACIDS; BIOSENSORS; ELECTRONIC PROPERTIES; ION IMPLANTATION; LITHOGRAPHY; NANOELECTRONICS; NANOWIRES; POLYELECTROLYTES; SEMICONDUCTING SILICON COMPOUNDS; WET ETCHING; WIRE;

SILICON WAFERS;

EID: 77951478128     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200983316     Document Type: Article

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