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Volumn 2005, Issue , 2005, Pages 140-144
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Application of piezo-driven polymer microgripper in automatic transportation of micro object
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Author keywords
Micro gripper; Piezo actuator; Polymer
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Indexed keywords
ACTUATORS;
EXCIMER LASERS;
FINITE ELEMENT METHOD;
LASER ABLATION;
POLYMERS;
AUTOMATIC TRANSPORTATION;
MICRO-GRIPPERS;
PIEZO-ACTUATORS;
PIEZOELECTRIC DEVICES;
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EID: 33748909560
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICMECH.2005.1529242 Document Type: Conference Paper |
Times cited : (12)
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References (7)
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