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Volumn 5, Issue 5, 2008, Pages 1300-1303
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In-situ and real-time monitoring of high barrier layers growth onto polymeric substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION PEAKS;
ACTIVE LAYER;
BARRIER LAYERS;
ELLIPSOMETRIC DATA;
ENERGY RANGES;
FLEXIBLE ELECTRONIC DEVICES;
FLEXIBLE POLYMERIC SUBSTRATES;
GROWTH MECHANISMS;
IN-SITU;
INDUCE CORROSION;
MULTIWAVELENGTH;
OPTICAL PARAMETER;
ORGANIC-INORGANIC;
POLYMERIC SUBSTRATE;
PROTECTIVE LAYERS;
REAL TIME MONITORING;
REAL TIME SPECTROSCOPIC ELLIPSOMETRY;
SPECTROSCOPIC ELLIPSOMETERS;
TEREPHTHALATE;
TIME DEPENDENCE;
ULTRA-FAST;
ETHYLENE;
GAS ABSORPTION;
GAS PERMEABLE MEMBRANES;
MONITORING;
OPTICAL PROPERTIES;
POLYMERIC FILMS;
POLYMERS;
SILICON COMPOUNDS;
SILICON OXIDES;
SPECTROSCOPIC ELLIPSOMETRY;
SPONTANEOUS EMISSION;
STOICHIOMETRY;
THIN FILMS;
SUBSTRATES;
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EID: 77951112354
PISSN: 18626351
EISSN: 16101642
Source Type: Journal
DOI: 10.1002/pssc.200777827 Document Type: Conference Paper |
Times cited : (9)
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References (17)
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