Studies of the earliest stages of plasma-enhanced chemical vapor deposition of SiO2 on polymeric substrates

Thin Solid Films

Volumn 382, Issue 1-2, 2001, Pages 1-3

  Dennler, G ^a   Houdayer, A ^b   Latreche M ^c   Segui Y ^d   Wertheimer, M R ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

^c INSTITUTE FOR RESEARCH IN IMMUNOLOGY AND CANCER   (Canada)

^d UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES; POLYIMIDES; POLYPROPYLENES; REACTIVE ION ETCHING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

FRANK-VAN DER MERWE METHOD;

INORGANIC COATINGS;

EID: 0034823478     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01781-8     Document Type: Article

References (11)

1. H. Chatham, Surf. Coat. Technol. 78 (1996) 1.
2. A.S. da Silva Sobrinho, M. Latrèche, G. Gzeremuszkin, J.E. Klemberg-Sapieha, M.R. Wertheimer, J. Vac. Sci. Technol. A 16 (1998) 3190.
3. A.S da Silva Sobrinho, G. Gzeremuszkin, M. Latrèche, M.R. Wertheimer, J. Vac. Sci. Technol. A 18 (2000) 149.
4. J.T. Felts, Society of Vacuum Coaters, Proceedings of the 34th Annual Technical Conference, Philadelphia, USA, March 17-22, (1991) 184.
5. M. Ohring, The Materials Science of Thin Films, Academic Press, Boston, MA, 1992.
6. A. Bergeron, J.E. Klemberg-Sapieha, L. Martinu, J. Vac. Sci. Technol. A 16 (1998) 3227.
7. A.S. da Silva Sobrinho, M. Latrèche, G. Gzeremuszkin, G. Dennler, M.R. Wertheimer, Surf. Coat. Technol. 116-119 (1999) 1204.
8. A.M. Wrobel, B. Lamontagne, M.R. Wertheimer, Plasma Chem. Plasma Process. 8 (1988) 315.
9. G. Beamson, D. Briggs, High Resolution XPS of Organic Polymer, Wiley, New York, 1992.
10. C. Bichler, M. Bischoff, H.C. Langowsky, U. Moosheimer, Society of Vacuum Coaters, Proceedings of the 39th Annual Technical Conference, Philadelphia, USA, May 5-10, (1996) 378.
11. G. Gzeremuszkin, M. Latrèche, M.R. Wertheimer, Society of Vacuum Coaters, Proceedings of the 43rd Annual Technical Conference, Denver, USA, May 17-21, 2000, 8.