Medium-range order in a-Si:H films prepared from hydrogen diluted silane

Physica Status Solidi (A) Applications and Materials Science

Volumn 207, Issue 3, 2010, Pages 548-551

  Vavrunkova, Veronika ^a   Van Elzakker, Gijs ^b   Zeman, Miro ^b   Sutta, Pavol ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; DIFFRACTION PEAKS; FLOW RATIOS; FULL WIDTH OF HALF MAXIMUM; HYDROGEN DILUTED SILANE; HYDROGENATED SILICON; MEDIUM RANGE ORDER; ORDERED DOMAINS; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION; SINGLE CRYSTALLINE SILICON; TETRAGONAL LATTICES; XRD; XRD ANALYSIS;

AMORPHOUS FILMS; FILM PREPARATION; METALLIC FILMS; PLASMA DEPOSITION; RAMAN SPECTROSCOPY; SILANES; STRUCTURAL ANALYSIS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS SILICON;

EID: 77950980024     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200982759     Document Type: Article

References (13)

1. H. Fritzsche, Annu. Rev. Mater. Res. 31, 47 (2001).
2. M. Zeman, G. van Elzakker, F. D. Tichelaar, and P. Sutta, Philos. Mag. 89(28), 2435 (2009).
3. G. van Elzakker, V. Nǎaždy, F. D. Tichelaar, J. W. Metselaar, and M. Zeman, Thin Solid Films 511/512, 252 (2006).
4. A. H. Mahan, Phys. Rev. B 61, 1677 (2000).
5. S. Minomura, K. Tsuji, H. Oyanagi, and Y. Fujii, J. Non-Cryst. Solids 35/36, 513 (1980).
6. A. H. Mahan, D. L. Williamson, and T. E. Furtak, Mater. Res. Soc. Symp. Proc. 467, 657 (1997).
7. D. L. Williamson, Mater. Res. Soc. Symp. Proc. 557, 251 (1999).
8. J. I. Langford, J. Appl. Crystallogr. 11, 10 (1978).
9. R. Delhez, Th. H. de Keijser, and E. J. Mittemeijer, Fresenius Z. Anal. Chem. 312, 1 (1982).
10. W. Wei, G. Xu, J. Wang, and T. Wang, Vacuum 81, 656 (2007).
11. Y.-B. Park and S.-W. Rhee, J. Appl. Phys. 90, 217 (2001).
12. J. Müllerová, P. Sutta, G. van Elzakker, M. Zeman, and M. Mikula, Appl. Surf. Sci. 254, 3690 (2008).
13. A. H. Mahan, T. Su, D. L. Williamson, L. M. Gedvilas, S. P. Ahrenkiel, P. A. Parilla, Y. Xu, and D. A. Ginley, Adv. Funct. Mater. 19, 2338 (2009).