White-light interferometric sensor for rough surface height distribution measurement

IEEE Sensors Journal

Volumn 10, Issue 6, 2010, Pages 1125-1132

  Manojlović, Lazo Mihajlo ^a,b   Živanov, Miloš B ^c   Marinčič, Aleksandar S ^d  

^a Statistical Office of the Republic of Serbia   (Serbia)

^b Zrenjanin Technical College   (Serbia)

^c UNIVERSITY OF NOVI SAD   (Serbia)

^d SERBIAN ACADEMY OF SCIENCES AND ARTS   (Serbia)

Author keywords

Channeled spectrum; Fiber optic sensor; Surface roughness measurement; White light interferometry

Indexed keywords

CHANNELED SPECTRUM; EXPERIMENTAL SETUP; HEIGHT DISTRIBUTION; HIGH FREQUENCY; INTERFEROMETERIC; INTERFEROMETRIC SENSING; INTERFEROMETRIC SENSOR; INVERSE FOURIER TRANSFORMS; MATHEMATICAL ANALYSIS; MEASUREMENT RESULTS; OPTICAL POWER SPECTRUM; PROBABILITY DENSITY FUNCTION (PDF); ROUGH SURFACES; SENSING UNIT; WHITE LIGHT; WHITE LIGHT SOURCES; WHITE-LIGHT INTERFEROMETRY;

FIBER OPTIC SENSORS; FIBER OPTICS; LIGHT SOURCES; MATHEMATICAL MODELS; METAL ANALYSIS; POLARIMETERS; PROBABILITY DENSITY FUNCTION; PROBABILITY DISTRIBUTIONS; RAPID SOLIDIFICATION; ROUGHNESS MEASUREMENT; SENSORS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

INTERFEROMETRY;

FIBER OPTICS; FOURIER ANALYSIS; INFRARED SPECTRA; INTERFEROMETRY; LIGHT SOURCES; MATHEMATICAL MODELS; MEASUREMENT; METALS; POLARIMETRY; PROBABILITY; ROUGHNESS; SENSORS; SOLIDIFICATION; SURFACE PROPERTIES;

EID: 77950847446     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2037239     Document Type: Article

References (28)

1. T. R. Thomas, Rough Surfaces , 2nd ed. Singapore: Imperial College Press, 1999.
2. C. Y. Poon and B. Bhushan, "Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler," Wear, vol.190, pp. 76-88, 1995.
3. F. Farahi and D. A. Jackson, "A fibre optic interferometric system for surface profiling," Rev. Sci. Instrum., vol.61, pp. 753-755, 1990.
4. C. Gorecki, "Interferogram analysis using a Fourier transform method for automatic 3D surface measurement," Pure Appl. Opt., vol.1, pp. 103-110, 1992 .
5. E. Lorincz, P. Richter, and F. Engard, "Interferometric statistical measurement of surface roughness," Appl. Opt., vol.25 , pp. 2778-2784, 1986. (Pubitemid 17610889)
6. H. C. Kandpal, D. S. Mehta, and J. S. Vaishya, "Simple method for measurement of surface roughness using spectral interferometry," Opt. Lasers Eng., vol.34, pp. 139-148, 2000. (Pubitemid 32196001)
7. F. Gao, R. K. Leach, J. Petzing, and J. M. Coupland, "Surface measurement errors using commercial scanning white light interferometers ," Meas. Sci. Technol., vol.19, pp. 1-13, 2008. (Pubitemid 351189594)
8. A. M. Hamed, H. El-Ghandoor, F. El-Diasty, and M. Saudy, "Analysis of speckle images to assess surface roughness," Opt. Laser Technol., vol.36, pp. 249-253, 2004.
9. B. van Ginneken, M. Stavridi, and J. J. Koenderink, "Diffuse and specular reflectance from rough surfaces," Appl. Opt., vol.37, pp. 130-139, 1998. (Pubitemid 128657250)
10. S. L. Toh, H. M. Shang, and C. J. Tay, "Surface-roughness study using laser speckle method," Opt. Lasers Eng., vol.29, pp. 217-225, 1998. (Pubitemid 128458174)
11. U. Persson , "A fibre-optic surface-roughness sensor," J. Mater. Process. Technol., vol.95, pp. 107-111, 1999.
12. C. J. Tay, S. H.Wang, C. Quan, and H. M. Shang, "In situ surface roughness measurement using a laser scattering method," Opt. Commun., vol.218 , pp. 1-10, 2003.
13. U. Persson, "In-process measurement of surface roughness using light scattering," Wear, vol.215, pp. 54-58, 1998. (Pubitemid 128396537)
14. R.-S. Lu and G. Y. Tian, "On-line measurement of surface roughness by laser light scattering," Meas. Sci. Technol., vol.17, pp. 1496-1502, 2006. (Pubitemid 43787572)
15. G. Udupa, M. Singaperumal, R. S. Sirohi, and M. P. Kothiyal, "Characterization of surface topography by confocal microscopy: I. Principles and the measurement system," Meas. Sci. Technol., vol.11, pp. 305-314, 2000.
16. G. Udupa, M. Singaperumal, R. S. Sirohi, and M. P. Kothiyal, "Characterization of surface topography by confocal microscopy: II. The micro and macro surface irregularities," Meas. Sci. Technol., vol.11, pp. 315-329, 2000.
17. T. V. Vorburger and K. C. Ludema, "Ellipsometry of rough surfaces," Appl. Opt., vol.19, pp. 561-573, 1980.
18. N. Kumagai, S. Yamasaki, and H. Okushi, "Optical characterization of surface roughness of diamond by spectroscopic ellipsometry," Diamond Relat. Mater., vol.13, pp. 2092-2095, 2004.
19. K. Zhang, C. Butler, Q. Yang, and Y. Lu , "A fiber optic sensor for the measurement of surface roughness and displacement using artificial neural networks," IEEE Trans. Instrum. Meas., vol.46, no.4, pp. 899-902, Aug. 1997. (Pubitemid 127771647)
20. A. W. Domanski and T. R.Woliriski, "Surface roughness measurement with optical fibers," IEEE Trans. Instrum. Meas., vol.41, no.6, pp. 1057-1061, Dec. 1992.
21. B. J. Pernick, "Surface roughness measurements with an optical Fourier spectrum analyzer," Appl. Opt., vol.18, pp. 796-801, 1979. (Pubitemid 9466940)
22. V. M. Huynht, S. Kurada, and W. North, "Texture analysis of rough surfaces using optical Fourier transform," Meas. Sci. Technol., vol.2, pp. 831-837, 1991. (Pubitemid 21712355)
23. J. C. Stover, Optical Scattering-Measurement and Analysis. New York: McGraw-Hill, 1990.
24. R. H. Kingston, Optical Sources, Detectors, and Systems. San Diego, CA: Academic, 1995.
25. J.-P. Goure and I. Verrier , Optical Fibre Devices. London, U.K.: IOP Publishing Ltd., 2002.
26. I. D. Marinescu, E. Uhlmann, and T. K. Doi, Handbook of Lapping and Polishing. Boca Raton, FL: CRC Press, Taylor & Francis Group, 2007.
27. M.Wakaki, K. Kudo, and T. Shibuya, Physical Properties and Data of Optical Materials . Boca Raton, FL: Taylor & Francis Group, 2007.
28. C.Washington, Particle Size Analysis in Pharmaceutics and Other Industries . New York: Ellis Horwood, 2005.