Optical characterization of surface roughness of diamond by spectroscopic ellipsometry

Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 2092-2095

  Kumagai, N ^a   Yamasaki, S ^b   Okushi, H ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b NONE

Author keywords

Diamond; Dielectric function; Spectroscopic ellipsometry; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC MATERIALS; ELLIPSOMETRY; HIGH PRESSURE EFFECTS; MICROPROCESSOR CHIPS; SURFACE ROUGHNESS; SURFACE TREATMENT;

DIELECTRIC FUNCTIONS; OPTICAL CHARACTERIZATION; SPECTROSCOPIC ELLIPSOMETRY;

DIAMONDS;

EID: 7544219935     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.04.003     Document Type: Conference Paper

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