In-process measurement of surface roughness using light scattering

Wear

Volumn 215, Issue 1-2, 1998, Pages 54-58

  Persson, Ulf ^a  

^a MID SWEDEN UNIVERSITY   (Sweden)

Author keywords

In process measurement; Light scattering; Surface roughness; Topography

Indexed keywords

GRINDING MACHINES; LIGHT SCATTERING; SURFACE ROUGHNESS;

IN PROCESS ROUGHNESS MEASUREMENT;

ROUGHNESS MEASUREMENT;

EID: 0032028437     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(97)00279-2     Document Type: Article

References (21)

1. H. Dagnall, Exploring Surface Texture, Rank Taylor Hobson, Leicester, England, 1986.
2. T.R. Thomas (Ed.), Rough Surfaces, Longman, New York, 1982.
3. D.J. Whitehouse, Handbook of Surface Metrology, Institute of Physics Publishing, Bristol, 1994.
4. W. Grzesik, A revised model for predicting surface roughness in turning, Wear 194 (1996) 143-148.
5. K. Mitsui, In-process sensors for surface roughness and their applications, Precision Eng. 8 (4) (1986) 212-220.
6. J.M. Bennett, L. Mattsson, Introduction to surface roughness and scattering, Optical Society of America, Washington, DC, 1989.
7. T. Asakura, Surface roughness measurement, in: R.K. Erf (Ed.), Speckle Metrology, Academic Press, New York, (1978) pp. 11-49.
8. H. Fujii, T. Asakura, Roughness measurements of metal surfaces using laser speckle, J. Opt. Soc. Am. 67 (9) (1977).
9. J.C. Wyant, O. Kwon, C.R. Hayslett, Rough surface interferometry at 10.6 μm, Appl. Opt 19(11) (1980) 1862-1869.
10. T.V. Vorburger, E.C. Teague, Optical techniques for on-line measurement of surface topography, Precision Eng. (1981) 61-83.
11. R. Brodmann, T.G. Thurn, An optical instrument for measuring the roughness in production control, Ann. CIRP 33 (1) (1984) .
12. H. Takeyama, H. Sekiguchi, R. Murata, Matsuzaki, In-process detection of surface roughness in machining, Ann. CIRP 25 (1) (1976) 467-471.
13. T.V. Vorburger, E. Marx, T.R. Lettieri, Regimes of surface roughness measurable with light scattering, Appl. Opt. 32 (19) (1993) 3401-3408.
14. P.M. Lonardo, G.F. Micheletti, Testing a new optical sensor for inprocess detection of surface roughness, Ann. CIRP 27 (1) (1978) .
15. T.V. Vorburger, E.C. Teague, Optical techniques for on-line measurement of surface topography, Precision Eng. (1981) 61-83.
16. R.D. Young, T.V. Vorburger, E.C. Teague, In-process and on-line measurement of surface finish, Ann. CIRP 29 (1) (1980) 435-440.
17. W. Burger, S. Blaszczak, Anwendung eines optoelektronischen rauheitssensors beim aussenrundeinstechschleifen, Feingerätetechnik (Berlin) 39 (1) (1990) 12-13.
18. L.H. Tanner, M. Fahoum, A study of the surface parameters of ground and lapped metal surfaces, using specular and diffuse reflection of laser light, Wear 36 (1976) 299-316.
19. R. Silvennoinen, K.E. Peiponen, T. Asakura, Y. Zhang, C. Gu, K. Ikonen, E.J. Morley, Specular reflectance of cold-rolled aluminium surfaces, Opt. Lasers Eng. 17 (1992) 103-109.
20. E.P. Lavin, Specular Reflection, Adam Hilger, London, 1971.
21. P. Beckmann, A. Spizzichino, The scattering of Electromagnetic Waves from Rough Surfaces, Artech House, 1987.