Suspended slab and photonic crystal waveguides in lithium niobate

Journal of Vacuum Science and Technology B

Volumn 28, Issue 2, 2010, Pages 316-320

  Si, Guangyuan ^a   Teo, Ee Jin ^a   Bettiol, Andrew A ^a   Teng, Jinghua ^b   Danner, Aaron J ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; ION BEAMS; ION IMPLANTATION; LASER OPTICS; LITHIUM; NIOBIUM COMPOUNDS; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON PHOTONICS; SILICON WAFERS; WAFER BONDING; WAVEGUIDE COMPONENTS;

CRYSTAL ION SLICING; CRYSTAL WAVEGUIDES; FOCUSED ION BEAM MILLING; IONS IMPLANTATION; LITHIUM NIOBATE; PROCESSING TECHNIQUE; SELECTIVE WET ETCHING; SILICON ON INSULATOR STRUCTURES; SLAB WAVEGUIDES; WET ETCHING TECHNIQUES;

PHOTONIC CRYSTALS;

EID: 77950563662     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3327925     Document Type: Article

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