A novel wet-etching method using joint proton source in LiNbO3

IEEE Photonics Technology Letters

Volumn 18, Issue 4, 2006, Pages 568-570

  Ting, Tien Lun ^a   Chen, Liang Yin ^a   Wang, Way Seen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Integrated optics; Lithium niobate; Optical ridge waveguide; Proton exchange (PE)

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; LITHIUM NIOBATE; OPTICAL WAVEGUIDES; PROTONS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

OPTICAL RIDGE WAVEGUIDE; PROTON EXCHANGE (PE); WET-ETCHING METHOD;

INTEGRATED OPTICS;

EID: 32044457941     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.863998     Document Type: Article

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